Graduate Institute of Electronics Engineering (GIEE), National Taiwan University, Taipei, Taiwan.
Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan.
Sci Rep. 2023 Apr 8;13(1):5781. doi: 10.1038/s41598-023-32655-9.
Graphene nanoribbons have many extraordinary electrical properties and are the candidates for semiconductor industry. In this research, we propose a design of Coved GNRs with periodic structure ranged from 4 to 8 nm or more, of which the size is within practical feature sizes by advanced lithography tools. The carrier transport properties of Coved GNRs with the periodic coved shape are designed to break the localized electronic state and reducing electron-phonon scattering. In this way, the mobility of Coved GNRs can be enhanced by orders compared with the zigzag GNRs in same width. Moreover, in contrast to occasional zero bandgap transition of armchair and zigzag GNRs without precision control in atomic level, the Coved GNRs with periodic edge structures can exclude the zero bandgap conditions, which makes practical the mass production process. The designed Coved-GNRs is fabricated over the Germanium (110) substrate where the graphene can be prepared in the single-crystalline and single-oriented formants and the edge of GNRs is later repaired under "balanced condition growth" and we demonstrate that the propose coved structures are compatible to current fabrication facility.
石墨烯纳米带具有许多非凡的电学性能,是半导体工业的候选材料。在这项研究中,我们提出了一种具有周期性结构的 Coved GNRs 的设计,其尺寸范围为 4 到 8nm 或更大,这在先进的光刻工具的实际特征尺寸范围内。具有周期性弯曲形状的 Coved GNRs 的载流子输运特性旨在打破局域电子态并减少电子-声子散射。通过这种方式,与相同宽度的锯齿形 GNRs 相比,Coved GNRs 的迁移率可以提高几个数量级。此外,与没有原子级精度控制的扶手椅和锯齿形 GNRs 偶尔出现零带隙跃迁相比,具有周期性边缘结构的 Coved GNRs 可以排除零带隙条件,这使得大规模生产过程成为可能。设计的 Coved-GNRs 是在锗(110)衬底上制造的,在这种衬底上可以以单晶和单取向形式制备石墨烯,并且 GNRs 的边缘可以在“平衡条件生长”下进行修复,我们证明了所提出的弯曲结构与当前的制造设施兼容。