Center for Advanced Optoelectronic Functional Materials Research, and Key Laboratory for UV Emitting Materials and Technology of Ministry of Education, National Demonstration Center for Experimental Physics Education, Northeast Normal University, 5268 Renmin Street, Changchun 130024, China.
Corning Research & Development Corporation, 1 Riverfront Plaza, Corning, New York 14831, United States.
ACS Appl Mater Interfaces. 2023 Apr 19;15(15):19230-19240. doi: 10.1021/acsami.3c02040. Epub 2023 Apr 11.
Random microlens arrays (rMLAs) have been widely applied as a beam-shaping component within an optical system. Silica glass is undoubtedly the best choice for rMLAs because of its wide range of spectra with high transmission and high damage threshold. Yet, machining silica glass with user-defined shapes is still challenging. In this work, novel design and fabrication methods of random silica-glass microlens arrays (rSMLAs) are proposed and a detailed investigation of this technology is presented. Based on the molding technology, the fabricated rSMLAs with tunable divergent angles demonstrate superior physical properties with 1.81 nm roughness, 1074.33 HV hardness, and excellent thermal stability at 1250 °C for 3 h. Meanwhile, their characterized optical performance shows a high transmission of over 90% in the ultraviolet spectrum. The fabricated two types of rSMLAs exhibit excellent effects of beam homogenization with surprising energy utilization (more than 90%) and light spot uniformity (more than 80%). This innovative process paves a new route for fabricating rMLAs on solid silica glass and breaking down the barrier of rMLAs to broader applications.
随机微透镜阵列（rMLA）已广泛应用于光学系统中的光束整形元件。由于其具有广泛的光谱范围、高透过率和高损伤阈值，因此硅玻璃无疑是 rMLA 的最佳选择。然而，用用户定义的形状加工硅玻璃仍然具有挑战性。在这项工作中，提出了新型随机硅玻璃微透镜阵列（rSMLA）的设计和制造方法，并对该技术进行了详细的研究。基于模压技术，所制造的具有可调发散角的 rSMLA 具有出色的物理性能，表面粗糙度为 1.81nm，硬度为 1074.33HV，在 1250°C 下稳定 3 小时。同时，其具有优异的光学性能，在紫外光谱下的透过率超过 90%。所制造的两种类型的 rSMLA 具有出色的光束均化效果，能量利用率（超过 90%）和光斑均匀性（超过 80%）令人惊讶。这项创新工艺为在固体硅玻璃上制造 rMLA 开辟了新途径，打破了 rMLA 更广泛应用的障碍。
