Appl Opt. 2023 May 1;62(13):3445-3453. doi: 10.1364/AO.484446.
Microlens arrays (MLAs) are widely used in homogenized laser beams due to excellent optical properties. However, the interference effect generated in traditional MLA (tMLA) homogenization will reduce the quality of the homogenized spot. Hence, the random MLA (rMLA) was proposed to reduce the interference effect in the homogenization process. To achieve mass production of these high-quality optical homogenization components, the rMLA with randomness in both period and sag height was proposed first. Subsequently, MLA molds were ultra-precision machined on S316 molding steel by elliptical vibration diamond cutting. Furthermore, the rMLA components were precisely fabricated by applying molding technology. Finally, Zemax simulation and homogenization experiments were carried out to verify the advantage of the designed rMLA.
微透镜阵列（MLA）由于其优异的光学性能，被广泛应用于激光光束的均匀化。然而，传统微透镜阵列（tMLA）均匀化中产生的干涉效应会降低均匀光斑的质量。因此，提出了随机微透镜阵列（rMLA）以减少均匀化过程中的干涉效应。为了实现这些高质量光学均匀化组件的大规模生产，首先提出了周期和凹陷高度均具有随机性的 rMLA。随后，通过椭圆振动金刚石切削在 S316 成型钢上超精密加工 MLA 模具。此外，通过成型技术精确制造 rMLA 组件。最后，通过 Zemax 模拟和均匀化实验验证了所设计的 rMLA 的优势。
