Park Gyeongbae, Kim Dongbeom, Kim Geonwoo, Jeong Unyong
Department of Materials Science and Engineering, Pohang University of Science and Technology, 77, Choengam-ro, Nam-gu, Pohang-si, Gyeongsangbuk-do 37673, Republic of Korea.
ACS Nanosci Au. 2022 Aug 31;2(6):527-538. doi: 10.1021/acsnanoscienceau.2c00027. eCollection 2022 Dec 21.
Although multicomponent inorganic thin films (metal-oxides, -carbides, -nitrides, and -chalcogenides) have been synthesized by polymer-assisted deposition (PAD), synthesis of high-performance transparent conducting oxides (TCOs) has been rarely reported. TCO requires (i) removal of impurities, (ii) high-density oxide film, (iii) homogeneity in crystal structures and film morphology, and (iv) controllable elemental doping. This study performs a systematic investigation on preparation of stable multicomponent metal-polymer complex solutions by removing the counteranions in the solution. This study also proposes accurate acid-base titration for each metal species in order to minimize the amount of PEI, thus maximizing the density of the film. As a representative TCO, Sn-doped InO (ITO) films have been achieved. The ITO film has an excellent sheet resistance (24.5 Ω/sq) at 93% optical transparency, with a figure of merit of 2.1 × 10 Ω, which is comparable to the best.
尽管通过聚合物辅助沉积（PAD）已合成了多组分无机薄膜（金属氧化物、碳化物、氮化物和硫族化物），但高性能透明导电氧化物（TCO）的合成却鲜有报道。TCO要求（i）去除杂质，（ii）形成高密度氧化膜，（iii）晶体结构和薄膜形态具有均匀性，以及（iv）可控制的元素掺杂。本研究通过去除溶液中的抗衡阴离子，对稳定的多组分金属 - 聚合物复合溶液的制备进行了系统研究。本研究还针对每种金属物种提出了精确的酸碱滴定法，以尽量减少聚乙烯亚胺（PEI）的用量，从而使薄膜密度最大化。作为一种代表性的TCO，已制备出掺锡氧化铟（ITO）薄膜。该ITO薄膜在93%的光学透明度下具有出色的方阻（24.5 Ω/sq），品质因数为2.1×10 Ω，与最佳性能相当。
