Crisci Teresa, Moretti Luigi, Gioffrè Mariano, Casalino Maurizio
Department of Mathematics and Physics, University of Campania "Luigi Vanvitelli", Viale Abramo Lincoln, 5, 81100 Caserta, Italy.
Institute of Applied Science and Intelligent Systems "Eduardo Caianiello" (CNR), Via P. Castellino n. 141, 80131 Naples, Italy.
Micromachines (Basel). 2023 Apr 23;14(5):906. doi: 10.3390/mi14050906.
In this work, we theoretically investigate a graphene/silicon Schottky photodetector operating at 1550 nm whose performance is enhanced by interference phenomena occurring inside an innovative Fabry-Pèrot optical microcavity. The structure consists of a hydrogenated amorphous silicon/graphene/crystalline silicon three-layer realized on the top of a double silicon-on-insulator substrate working as a high-reflectivity input mirror. The detection mechanism is based on the internal photoemission effect, and the light-matter interaction is maximized through the concept of confined mode, exploited by embedding the absorbing layer within the photonic structure. The novelty lies in the use of a thick layer of gold as an output reflector. The combination of the amorphous silicon and the metallic mirror is conceived to strongly simplify the manufacturing process by using standard microelectronic technology. Configurations based on both monolayer and bilayer graphene are investigated to optimize the structure in terms of responsivity, bandwidth, and noise-equivalent power. The theoretical results are discussed and compared with the state-of-the-art of similar devices.
在这项工作中，我们从理论上研究了一种工作在1550 nm的石墨烯/硅肖特基光电探测器，其性能通过在创新的法布里-珀罗光学微腔内发生的干涉现象得到增强。该结构由氢化非晶硅/石墨烯/晶体硅三层组成，在用作高反射率输入镜的双绝缘体上硅衬底顶部实现。检测机制基于内光电效应，通过将吸收层嵌入光子结构中利用受限模式的概念，使光与物质的相互作用最大化。新颖之处在于使用厚金层作为输出反射器。非晶硅和金属镜的组合旨在通过使用标准微电子技术极大地简化制造工艺。研究了基于单层和双层石墨烯的配置，以在响应度、带宽和噪声等效功率方面优化结构。对理论结果进行了讨论，并与同类器件的现有技术进行了比较。
