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在金属与二维半导体之间形成稳定的范德华接触。

Forming Stable van der Waals Contacts between Metals and 2D Semiconductors.

作者信息

Kwon Gihyeon, Kim Hyeon-Sik, Jeong Kwangsik, Kim Myeongjin, Nam Gi Hwan, Park Hyunjun, Yoo Kyunghwa, Cho Mann-Ho

机构信息

Department of Physics, Yonsei University, Seoul, 03722, Republic of Korea.

Division of Physics and Semiconductor Science, Dongguk University, Seoul, 04620, Republic of Korea.

出版信息

Small Methods. 2023 Sep;7(9):e2300376. doi: 10.1002/smtd.202300376. Epub 2023 Jun 8.

Abstract

High-performing 2D electrical and optical devices can be realized by forming an ideal van der Waals (vdW) metal contact with weak interactions and stable interface states. However, the methods for applying metal contacts while avoiding damage from metal deposition present challenges in realizing a uniform, stable vdW interface. To overcome this problem, this study develops a method for forming vdW contacts using a sacrificial Se buffer layer. This study explores this method by investigating the difference in the Schottky barrier height between the vdW metal contact deposited using a buffer layer, a transferred metal contact, and a conventional directly deposited metal contact using rectification and photovoltaic characteristics of a Schottky diode structure with graphite. Evidently, the Se buffer layer method forms the most stable and ideal vdW contact while preventing Fermi-level pinning. A tungsten diselenide Schottky diode fabricated using these vdW contacts with Au and graphite as the top and bottom electrodes, respectively, exhibits excellent operation with an ideality factor of ≈1, an on/off ratio of > 10 , and coherent properties. Additionally, when using only the vdW Au contact, the electrical and optical properties of the device can be minutely modulated by changing the structure of the Schottky diode.

摘要

通过形成具有弱相互作用和稳定界面态的理想范德华(vdW)金属接触,可以实现高性能的二维电气和光学器件。然而,在施加金属接触同时避免金属沉积造成损伤的方法,在实现均匀、稳定的vdW界面方面存在挑战。为克服这一问题,本研究开发了一种使用牺牲性硒缓冲层形成vdW接触的方法。本研究通过利用具有石墨的肖特基二极管结构的整流和光伏特性,研究使用缓冲层沉积的vdW金属接触、转移金属接触和传统直接沉积金属接触之间的肖特基势垒高度差异,来探索这种方法。显然,硒缓冲层方法在防止费米能级钉扎的同时,形成了最稳定和理想的vdW接触。分别以金和石墨作为顶部和底部电极,使用这些vdW接触制造的二硒化钨肖特基二极管,具有理想因子约为1、开/关比大于10以及相干特性等优异的工作性能。此外,仅使用vdW金接触时,通过改变肖特基二极管的结构,可以对器件的电学和光学性质进行精细调制。

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