Ivanov Ivan, Skryshevsky Valeriy, Belarouci Ali
Taras Shevchenko National University of Kyiv, 64 Volodymyrska, Kyiv 01033, Ukraine.
Univ Lyon, ECL, INSA Lyon, CNRS, UCBL, CPE Lyon, INL, UMR5270, Ecully 69130, France.
ACS Omega. 2023 Jun 1;8(23):21265-21276. doi: 10.1021/acsomega.3c02526. eCollection 2023 Jun 13.
In this article, the authors theoretically and experimentally investigated ways to improve the efficiency of porous silicon (PS)-based optical microcavity sensors as a 1D/2D host matrix for electronic tongue/nose systems. The transfer matrix method was used to compute reflectance spectra of structures with different [] sets of low and high bilayer refractive indexes, the cavity position λ, and the number of bilayers . Sensor structures were prepared by electrochemically etching a silicon wafer. The kinetics of adsorption/desorption processes of ethanol-water-based solution was monitored in real time with a reflectivity probe-based setup. It was theoretically and experimentally demonstrated that the sensitivity of the microcavity sensor is higher for structures with refractive indexes in the lower range (and the corresponding porosity values in the upper range). The sensitivity is also improved for structures with the optical cavity mode (λ) adjusted toward longer wavelengths. The sensitivity of a distributed Bragg reflector (DBR) with cavity increases for a structure with cavity position λ in the long wavelength region. The full width at half maximum (fwhm) of the microcavity is smaller and the quality factor of microcavity () is higher for the DBR with a larger number of structure layers . The experimental results are in good agreement with the simulated data. We believe that our results can help in developing rapid, sensitive, and reversible electronic tongue/nose sensing devices based on a PS host matrix.
在本文中，作者从理论和实验两方面研究了如何提高基于多孔硅（PS）的光学微腔传感器的效率，该传感器作为电子舌/鼻系统的一维/二维主体基质。采用转移矩阵法计算了具有不同低、高双层折射率集、腔位置λ和双层数的结构的反射光谱。通过对硅片进行电化学蚀刻制备传感器结构。使用基于反射率探头的装置实时监测乙醇 - 水基溶液的吸附/解吸过程动力学。从理论和实验上都证明，对于折射率较低范围（以及相应孔隙率值较高范围）的结构，微腔传感器的灵敏度更高。对于光学腔模式（λ）向更长波长调整的结构，灵敏度也有所提高。对于腔位置λ在长波长区域的结构，带腔分布式布拉格反射器（DBR）的灵敏度增加。对于具有更多结构层数的DBR，微腔的半高宽（fwhm）更小，微腔品质因数（）更高。实验结果与模拟数据吻合良好。我们相信我们的结果有助于开发基于PS主体基质的快速、灵敏且可逆的电子舌/鼻传感装置。
