Sun Pingping, Lei Chenglong, Ge Chuannan, Guo Yunjun, Zhu Xingxing
School of Physics and Information Engineering, Jiangsu Second Normal University, Nanjing 211200, China.
School of Electrical Engineering, Southeast University, Nanjing 210096, China.
Micromachines (Basel). 2023 May 26;14(6):1117. doi: 10.3390/mi14061117.
With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse velocities at the same time. To achieve a high speed, high resolution, and low deviation, in this paper we present a compact piezo-inertia actuator with a double rocker-type flexure hinge mechanism. The structure and operating principle are discussed in detail. To study the load capacity, voltage characteristics, and frequency characteristics of the actuator, we made a prototype and conducted a series of experiment. The results indicate good linearity in both positive and negative output displacements. The maximum positive and negative velocities are about 10.63 mm/s and 10.12 mm/s, respectively, and the corresponding speed deviation is 4.9%. The positive and negative positioning resolutions are 42.5 nm and 52.5 nm, respectively. In addition, the maximum output force is 220 g. These results show that the designed actuator has a minor speed deviation and good output characteristics.
压电惯性致动器结构简单、控制方法简便，是微精密工业领域的一个优选实施例。然而，此前报道的大多数致动器无法同时实现高速、高分辨率以及正反速度之间的低偏差。为了实现高速、高分辨率和低偏差，本文提出了一种具有双摇杆式柔性铰链机构的紧凑型压电惯性致动器。详细讨论了其结构和工作原理。为了研究该致动器的负载能力、电压特性和频率特性，我们制作了一个原型并进行了一系列实验。结果表明，正负输出位移均具有良好的线性度。最大正速度和负速度分别约为10.63毫米/秒和10.12毫米/秒，相应的速度偏差为4.9%。正定位分辨率和负定位分辨率分别为42.5纳米和52.5纳米。此外，最大输出力为220克。这些结果表明，所设计的致动器速度偏差较小，输出特性良好。
