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具有拉伸-压缩结构的双轴高G压阻式加速度计的设计

Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension-Compression Structure.

作者信息

Wang Peng, Yang Yujun, Chen Manlong, Zhang Changming, Wang Nan, Yang Fan, Peng Chunlei, Han Jike, Dai Yuqiang

机构信息

School of Mechanical Engineering, Shaanxi University of Technology, Hanzhong 723001, China.

Shaanxi Key Laboratory of Industrial Automation, Hanzhong 723001, China.

出版信息

Micromachines (Basel). 2023 Jul 25;14(8):1492. doi: 10.3390/mi14081492.

DOI:10.3390/mi14081492
PMID:37630028
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10456674/
Abstract

To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension-compression is meticulously designed. This study begins by thoroughly examining the tension-compression measurement mechanism and designing the sensor's sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 µV/g in the X direction and 1.42 µV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively.

摘要

为满足武器侵彻、航空航天、爆炸冲击等领域对多维高过载加速度的测量需求，精心设计了一种含拉压的双轴压阻式加速度计。本研究首先深入研究拉压测量机理并设计传感器的敏感结构。考虑到悬臂梁的应力变化特性，开发了一种信号测试电路以有效减轻交叉干扰。随后，根据悬臂梁的应力变化特性设计了抗交叉干扰的信号测试电路。接着，应用有限元方法对结构进行分析，得到传感器的量程、振动模态和灵敏度等性能指标。最后，分析了芯片的工艺流程和封装方案。结果表明，该传感器的量程为200000g，X方向灵敏度为1.39µV/g，Y方向灵敏度为1.42µV/g，X、Y方向的固有频率分别为509.8kHz和510.2kHz。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/63ae45204cce/micromachines-14-01492-g010a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/b4e0d08f66d1/micromachines-14-01492-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/25412fd6c763/micromachines-14-01492-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/de868de34e2b/micromachines-14-01492-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/3491986b0a8c/micromachines-14-01492-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/ba4ae3d53e6b/micromachines-14-01492-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/c3a3bff98e88/micromachines-14-01492-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/5033ef80388d/micromachines-14-01492-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/3f406550f288/micromachines-14-01492-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/63ae45204cce/micromachines-14-01492-g010a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/b4e0d08f66d1/micromachines-14-01492-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/25412fd6c763/micromachines-14-01492-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/de868de34e2b/micromachines-14-01492-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/3491986b0a8c/micromachines-14-01492-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/ba4ae3d53e6b/micromachines-14-01492-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/c3a3bff98e88/micromachines-14-01492-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/5033ef80388d/micromachines-14-01492-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/3f406550f288/micromachines-14-01492-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e50/10456674/63ae45204cce/micromachines-14-01492-g010a.jpg

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本文引用的文献

1
Reliability of MEMS in Shock Environments: 2000-2020.微机电系统在冲击环境中的可靠性：2000 - 2020年
Micromachines (Basel). 2021 Oct 20;12(11):1275. doi: 10.3390/mi12111275.
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Novel high-performance piezoresistive shock accelerometer for ultra-high-g measurement utilizing self-support sensing beams.基于自支撑传感梁的新型高性能压阻式冲击加速度计用于超高g值测量。
Rev Sci Instrum. 2020 Aug 1;91(8):085001. doi: 10.1063/5.0008451.
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Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology.基于MEMS技术的SOI三轴加速度传感器的制作与特性
Micromachines (Basel). 2019 Apr 9;10(4):238. doi: 10.3390/mi10040238.
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Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer.单（111）硅晶圆中单片集成三轴高冲击加速度计的设计、制造与测试
Micromachines (Basel). 2019 Mar 29;10(4):227. doi: 10.3390/mi10040227.
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Mechanical Structural Design of a MEMS-Based Piezoresistive Accelerometer for Head Injuries Monitoring: A Computational Analysis by Increments of the Sensor Mass Moment of Inertia.基于 MEMS 的压阻式加速度计的机械结构设计用于头部损伤监测：通过传感器质量惯性矩的增量进行计算分析。
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