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二氧化钒薄膜的高度可调MOCVD工艺：结构/形态特征与电动力学性质之间的关系

Highly Tunable MOCVD Process of Vanadium Dioxide Thin Films: Relationship between Structural/Morphological Features and Electrodynamic Properties.

作者信息

Pellegrino Anna Lucia, Lo Presti Francesca, Papari Gian Paolo, Koral Can, Andreone Antonello, Malandrino Graziella

机构信息

Dipartimento di Scienze Chimiche, Università di Catania, and INSTM UdR Catania, Viale A. Doria 6, I-95125 Catania, Italy.

Dipartimento di Fisica "E. Pancini", Università di Napoli "Federico II", Via Cinthia, I-80126 Napoli, Italy.

出版信息

Sensors (Basel). 2023 Aug 19;23(16):7270. doi: 10.3390/s23167270.

DOI:10.3390/s23167270
PMID:37631806
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10458005/
Abstract

The monoclinic structures of vanadium dioxide are widely studied as appealing systems due to a plethora of functional properties in several technological fields. In particular, the possibility to obtain the VO material in the form of thin film with a high control of structure and morphology represents a key issue for their use in THz devices and sensors. Herein, a fine control of the crystal habit has been addressed through an in-depth study of the metal organic chemical vapor deposition (MOCVD) synthetic approach. The focus is devoted to the key operative parameters such as deposition temperature inside the reactor in order to stabilize the P2/c or the C2/m monoclinic VO structures. Furthermore, the compositional purity, the morphology and the thickness of the VO films have been assessed through energy dispersive X-ray (EDX) analyses and field-emission scanning electron microscopy (FE-SEM), respectively. THz time domain spectroscopy is used to validate at very high frequency the functional properties of the as-prepared VO films.

摘要

二氧化钒的单斜结构因其在多个技术领域中具有大量功能特性而被广泛研究，是极具吸引力的体系。特别是，能够以对结构和形态具有高度可控性的薄膜形式获得VO材料，这对于其在太赫兹器件和传感器中的应用而言是一个关键问题。在此，通过对金属有机化学气相沉积（MOCVD）合成方法的深入研究，实现了对晶体习性的精细控制。重点关注诸如反应器内沉积温度等关键操作参数，以稳定P2/c或C2/m单斜VO结构。此外，分别通过能量色散X射线（EDX）分析和场发射扫描电子显微镜（FE-SEM）对VO薄膜的成分纯度、形态和厚度进行了评估。太赫兹时域光谱用于在非常高的频率下验证所制备VO薄膜的功能特性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/4b0ff7b2d916/sensors-23-07270-g008.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/53148f4d4a6a/sensors-23-07270-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/37b7aca1c1ad/sensors-23-07270-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/2dd653c44bf8/sensors-23-07270-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/4b0ff7b2d916/sensors-23-07270-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/417880b71660/sensors-23-07270-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/db23e638c997/sensors-23-07270-g002.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/16dc8a4dae4e/sensors-23-07270-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/53148f4d4a6a/sensors-23-07270-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/37b7aca1c1ad/sensors-23-07270-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/2dd653c44bf8/sensors-23-07270-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c6a/10458005/4b0ff7b2d916/sensors-23-07270-g008.jpg

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本文引用的文献

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Vanadium Oxide: Phase Diagrams, Structures, Synthesis, and Applications.氧化钒：相图、结构、合成与应用。
Chem Rev. 2023 Apr 26;123(8):4353-4415. doi: 10.1021/acs.chemrev.2c00546. Epub 2023 Mar 27.
2
Vanadium Oxides with Amorphous-Crystalline Heterointerface Network for Aqueous Zinc-Ion Batteries.具有非晶-晶态杂化界面网络的氧化钒用于水系锌离子电池。
Angew Chem Int Ed Engl. 2023 Mar 20;62(13):e202216290. doi: 10.1002/anie.202216290. Epub 2023 Feb 15.
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Influence of VO based structures and smart coatings on weather resistance for boosting the thermochromic properties of smart window applications.
基于VO的结构和智能涂层对耐候性的影响，以增强智能窗应用的热致变色性能。
RSC Adv. 2022 Oct 31;12(48):30985-31003. doi: 10.1039/d2ra04661j. eCollection 2022 Oct 27.
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Sensing enhancement of a Fabry-Perot THz cavity using switchable VO mirrors.利用可切换VO镜增强法布里-珀罗太赫兹腔的传感性能。
Opt Express. 2022 May 23;30(11):19402-19415. doi: 10.1364/OE.455941.
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Fine-tune d-band center of cobalt vanadium oxide nanosheets by N-doping as a robust overall water splitting electrocatalyst.通过氮掺杂微调氧化钴钒纳米片的d带中心作为一种高效的全水解电催化剂。
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Electrically Driven Reprogrammable Vanadium Dioxide Metasurface Using Binary Control for Broadband Beam Steering.基于二进制控制的电驱动可重编程二氧化钒超表面用于宽带波束转向
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VO-based ultra-reconfigurable intelligent reflective surface for 5G applications.用于5G应用的基于虚拟物体的超可重构智能反射面。
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