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银辅助的大规模连续二维单层膜的干法剥离

Ag-Assisted Dry Exfoliation of Large-Scale and Continuous 2D Monolayers.

作者信息

Ding Shuimei, Liu Chang, Li Zhiwei, Lu Zheyi, Tao Quanyang, Lu Donglin, Chen Yang, Tong Wei, Liu Liting, Li Wanying, Ma Likuan, Yang Xiaokun, Xiao Zhaojing, Wang Yiliu, Liao Lei, Liu Yuan

机构信息

Key Laboratory for Micro-Nano Optoelectronic Devices of Ministry of Education, School of Physics and Electronics, Hunan University, Changsha 410082, China.

出版信息

ACS Nano. 2024 Jan 9;18(1):1195-1203. doi: 10.1021/acsnano.3c11573. Epub 2023 Dec 28.

Abstract

Two-dimensional (2D) semiconductors have generated considerable attention for high-performance electronics and optoelectronics. However, to date, it is still challenging to mechanically exfoliate large-area and continuous monolayers while retaining their intrinsic properties. Here, we report a simple dry exfoliation approach to produce large-scale and continuous 2D monolayers by using a Ag film as the peeling tape. Importantly, the conducting Ag layer could be converted into AgO nanoparticles at low annealing temperature, directly decoupling the conducting Ag with the underlayer 2D monolayers without involving any solution or etching process. Electrical characterization of the monolayer MoS transistor shows a decent carrier mobility of 42 cm V s and on-state current of 142 μA/μm. Finally, a plasmonic enhancement photodetector could be simultaneously realized due to the direct formation of Ag nanoparticles arrays on MoS monolayers, without complex approaches for nanoparticle synthesis and integration processes, demonstrating photoresponsivity and detectivity of 6.3 × 10 A/W and 2.3 × 10 Jones, respectively.

摘要

二维(2D)半导体在高性能电子学和光电子学领域引起了广泛关注。然而,迄今为止,在保留其固有特性的同时,机械剥离大面积且连续的单层仍然具有挑战性。在此,我们报告一种简单的干法剥离方法,通过使用银膜作为剥离胶带制备大规模且连续的2D单层。重要的是,导电银层在低退火温度下可转化为AgO纳米颗粒,直接使导电银与下层2D单层解耦,而无需任何溶液或蚀刻过程。单层MoS晶体管的电学表征显示出42 cm² V⁻¹ s⁻¹ 的良好载流子迁移率和142 μA/μm的导通态电流。最后,由于在MoS单层上直接形成了银纳米颗粒阵列,无需复杂的纳米颗粒合成和集成工艺,可同时实现等离子体增强光电探测器,其光响应度和探测率分别为6.3×10⁻³ A/W和2.3×10¹¹ Jones。

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