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静电耦合音叉谐振器中模式局域化的分岔拓扑转移实验研究

Experimental Investigation of Mode Localization's Bifurcation Topology Transfer in Electrostatically Coupled Tuning Fork Resonators.

作者信息

Lyu Ming, Zhi Xiang, Yan Na, Sun Rongjian

机构信息

Institute of Transportation, Inner Mongolia University, Hohhot 010021, China.

Inner Mongolia Engineering Research Center for Intelligent Transportation Equipment, Hohhot 010021, China.

出版信息

Sensors (Basel). 2024 Feb 28;24(5):1563. doi: 10.3390/s24051563.

DOI:10.3390/s24051563
PMID:38475099
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10934075/
Abstract

Bifurcation topology transfer phenomena in the presence of mode localization are investigated using double-ended fixed electrostatically coupled tuning fork resonators. An analytical model is proposed for the coupled tuning fork resonators, and the effects of feedthrough capacitance on the structure are also analyzed and eliminated by means of data post-processing. Then, an open-loop experimental platform is established, when the system is in balance state, the quality factor is obtained under test as Q = 9858, and comparison of the experiment with numerical simulation results is in good agreement. Finally, with the voltage increases, the two resonators gradually exhibit nonlinear characteristics. It is worth noting that when one of the coupled resonators exhibits nonlinear vibration behavior, even though the vibration amplitude of the other resonator is lower than the critical amplitude, it still exhibits nonlinear behavior, and the results confirm the existence of the bifurcation topology transfer phenomenon in coupled resonators' mode localization phenomenon.

摘要

利用双端固定静电耦合音叉谐振器研究了存在模式局域化时的分叉拓扑转移现象。针对耦合音叉谐振器提出了一种解析模型，并通过数据后处理分析并消除了馈通电容对结构的影响。然后，搭建了一个开环实验平台，当系统处于平衡状态时，测试得到品质因数Q = 9858，实验结果与数值模拟结果比较吻合。最后，随着电压升高，两个谐振器逐渐呈现非线性特性。值得注意的是，当其中一个耦合谐振器表现出非线性振动行为时，即使另一个谐振器的振动幅度低于临界幅度，它仍然表现出非线性行为，结果证实了耦合谐振器模式局域化现象中存在分叉拓扑转移现象。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/a1ce37d36261/sensors-24-01563-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/b6da3da9dba2/sensors-24-01563-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/35bef75467e9/sensors-24-01563-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/f8f0fed3ca3f/sensors-24-01563-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/856ce70c5c2e/sensors-24-01563-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/109a2ea4c37f/sensors-24-01563-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/76c62b5decdc/sensors-24-01563-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/79790a2ce084/sensors-24-01563-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/742e18f0df90/sensors-24-01563-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/f4a9f9dfc997/sensors-24-01563-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/a1ce37d36261/sensors-24-01563-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/b6da3da9dba2/sensors-24-01563-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/35bef75467e9/sensors-24-01563-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/f8f0fed3ca3f/sensors-24-01563-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/856ce70c5c2e/sensors-24-01563-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/109a2ea4c37f/sensors-24-01563-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/76c62b5decdc/sensors-24-01563-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/79790a2ce084/sensors-24-01563-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/742e18f0df90/sensors-24-01563-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/f4a9f9dfc997/sensors-24-01563-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/205f/10934075/a1ce37d36261/sensors-24-01563-g010.jpg

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本文引用的文献

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Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review.微机械加速度计，具有亚微克/√赫兹噪声底：综述。
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