Li Han, Zhang Zhao, Zu Luhan, Hao Yongcun, Chang Honglong
Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, 127 Youyi West Road, Beilin District, Xi'an, 710072 China.
Microsyst Nanoeng. 2022 Apr 14;8:42. doi: 10.1038/s41378-022-00375-1. eCollection 2022.
This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a silicon shunt resistor, which causes stiffness perturbation to one resonator. The mode-localization phenomenon alters the energy distribution in the weakly coupled resonator system. A theoretical model of current sensing is established, and the performance of the current sensor is determined: the sensitivity of the electric current sensor is 567/A, the noise floor is 69.3 nA/√Hz, the resolution is 183.6 nA, and the bias instability is 81.6 nA. The mode-localized electric current sensor provides a new approach for measuring sub-microampere currents for applications in nuclear physics, including for photocurrent signals and transistor leakage currents. It could also become a key component of a portable mode-localized multimeter when combined with a mode-localized voltmeter. In addition, it has the potential for use in studying sensor arrays to achieve higher resolution.
本文概述了一种基于弱耦合谐振器系统机械敏感元件的新型模式局域化电流传感器的设计。利用弱耦合谐振器系统的高电压灵敏度优势，通过硅分流电阻将被测电流转换为电压，该电阻会对一个谐振器造成刚度扰动。模式局域化现象改变了弱耦合谐振器系统中的能量分布。建立了电流传感的理论模型，并确定了电流传感器的性能：电流传感器的灵敏度为567/A，本底噪声为69.3 nA/√Hz，分辨率为183.6 nA，偏置不稳定性为81.6 nA。模式局域化电流传感器为测量亚微安电流提供了一种新方法，可应用于核物理领域，包括光电流信号和晶体管漏电流的测量。当与模式局域化电压表结合时，它还可能成为便携式模式局域化万用表的关键部件。此外，它在研究传感器阵列以实现更高分辨率方面具有应用潜力。
