Wang Shih-Ming, Chiu Yu-Cheng, Wu Yu-Hsin, Chen Bo-Yi, Chang I-Ling, Chang Chih-Wei
Center for Condensed Matter Sciences, National Taiwan University, Taipei 10617, Taiwan; Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan.
Center for Condensed Matter Sciences, National Taiwan University, Taipei 10617, Taiwan.
Ultramicroscopy. 2024 Aug;262:113982. doi: 10.1016/j.ultramic.2024.113982. Epub 2024 Apr 26.
Backscattered electron (BSE) imaging based on scanning electron microscopy (SEM) has been widely used in scientific and industrial disciplines. However, achieving consistent standards and precise quantification in BSE images has proven to be a long-standing challenge. Previous methods incorporating dedicated calibration processes and Monte Carlo simulations have still posed practical limitations for widespread adoption. Here we introduce a bolometer platform that directly measures the absorbed thermal energy of the sample and demonstrates that it can help to analyze the atomic number (Z) of the investigated samples. The technique, named Atomic Number Electron Microscopy (ZEM), employs the conservation of energy as the foundation of standardization and can serve as a nearly ideal BSE detector. Our approach combines the strengths of both BSE and ZEM detectors, simplifying quantitative analysis for samples of various shapes and sizes. The complementary relation between the ZEM and BSE signals also makes the detection of light elements or compounds more accessible than existing microanalysis techniques.
基于扫描电子显微镜（SEM）的背散射电子（BSE）成像已在科学和工业领域中广泛应用。然而，事实证明，要在BSE图像中实现一致的标准和精确的定量分析一直是一项长期挑战。以往结合专用校准过程和蒙特卡罗模拟的方法在广泛应用方面仍存在实际限制。在此，我们介绍一种测辐射热计平台，它能直接测量样品吸收的热能，并证明其有助于分析被研究样品的原子序数（Z）。这项名为原子序数电子显微镜（ZEM）的技术以能量守恒作为标准化的基础，可作为近乎理想的BSE探测器。我们的方法结合了BSE和ZEM探测器的优势，简化了对各种形状和尺寸样品的定量分析。ZEM和BSE信号之间的互补关系也使得与现有微分析技术相比，检测轻元素或化合物变得更容易。
