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780纳米宽带氮化硅集成偏振旋转器

Broadband silicon nitride integrated polarization rotators at 780 nm.

作者信息

Pruessner Marcel W, Walsh Kyle J, Tyndall Nathan F, Fahrenkopf Nicholas M, Antohe Alin O, Stievater Todd H

出版信息

Opt Express. 2024 May 6;32(10):16702-16711. doi: 10.1364/OE.519590.

DOI:10.1364/OE.519590
PMID:38858869
Abstract

Polarization management, and in particular polarization rotation, is becoming increasingly important for photonic integrated circuits (PICs). While fiber-optic networks are generally polarization insensitive, the large aspect ratio of high-index-contrast PIC waveguides leads to a large polarization-dependent response of integrated components such as waveguides, optical cavities, couplers, etc. Although foundry-processed polarization rotators operating at telecom and datacom wavelengths (C- and O-band) have been demonstrated, to date, there have been few reports of devices operating at shorter wavelengths. This work demonstrates silicon nitride (SiN) polarization rotators operating from λ=700-1000 nm (the I/Z-band) that take advantage of optical coupling between two waveguiding layers in a standard foundry process. We demonstrate a broadband white-light polarization measurement setup that enables precise characterization of the polarization-dependent transmission of photonic waveguide devices. Measurements on foundry-processed devices confirm full TE-to-TM rotation exhibiting a maximum polarization extinction ratio (PER) approaching 20 dB (limited by our measurement setup), and an exceptionally large bandwidth of up to 160 nm with an insertion loss less than 0.2 dB. Beam propagation method (3D-BPM) simulations show good agreement with experimental data and enable the device parameters to be adjusted to accommodate different operating wavelengths and geometries with no changes to the existing foundry process. This work opens up opportunities for applications in quantum information and bio-sensing where operation at λ<1000nm is needed.

摘要

偏振管理,尤其是偏振旋转,对于光子集成电路(PIC)正变得越来越重要。虽然光纤网络通常对偏振不敏感,但高折射率对比度PIC波导的大纵横比导致诸如波导、光学腔、耦合器等集成组件产生很大的偏振相关响应。尽管已经展示了在电信和数据通信波长(C波段和O波段)工作的代工厂加工的偏振旋转器,但迄今为止,在较短波长下工作的器件报道很少。这项工作展示了氮化硅(SiN)偏振旋转器,其工作波长范围为λ = 700 - 1000 nm(I/Z波段),利用标准代工厂工艺中两个波导层之间的光耦合。我们展示了一种宽带白光偏振测量装置,能够精确表征光子波导器件的偏振相关传输。对代工厂加工器件的测量证实了从TE到TM的完全旋转,显示出最大偏振消光比(PER)接近20 dB(受我们的测量装置限制),以及高达160 nm的超大带宽,插入损耗小于0.2 dB。光束传播方法(3D - BPM)模拟与实验数据显示出良好的一致性,并能够在不改变现有代工厂工艺的情况下调整器件参数,以适应不同的工作波长和几何形状。这项工作为需要在λ < 1000 nm下运行的量子信息和生物传感应用开辟了机会。

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