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多层菱面体过渡金属二硫属化物单晶的界面外延

Interfacial epitaxy of multilayer rhombohedral transition-metal dichalcogenide single crystals.

作者信息

Qin Biao, Ma Chaojie, Guo Quanlin, Li Xiuzhen, Wei Wenya, Ma Chenjun, Wang Qinghe, Liu Fang, Zhao Mengze, Xue Guodong, Qi Jiajie, Wu Muhong, Hong Hao, Du Luojun, Zhao Qing, Gao Peng, Wang Xinqiang, Wang Enge, Zhang Guangyu, Liu Can, Liu Kaihui

机构信息

State Key Laboratory for Mesoscopic Physics, Frontiers Science Centre for Nano-optoelectronics, School of Physics, Peking University, Beijing, China.

Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education), Department of Physics, Renmin University of China, Beijing, China.

出版信息

Science. 2024 Jul 5;385(6704):99-104. doi: 10.1126/science.ado6038. Epub 2024 Jul 4.

Abstract

Rhombohedral-stacked transition-metal dichalcogenides (3R-TMDs), which are distinct from their hexagonal counterparts, exhibit higher carrier mobility, sliding ferroelectricity, and coherently enhanced nonlinear optical responses. However, surface epitaxial growth of large multilayer 3R-TMD single crystals is difficult. We report an interfacial epitaxy methodology for their growth of several compositions, including molybdenum disulfide (MoS), molybdenum diselenide, tungsten disulfide, tungsten diselenide, niobium disulfide, niobium diselenide, and molybdenum sulfoselenide. Feeding of metals and chalcogens continuously to the interface between a single-crystal Ni substrate and grown layers ensured consistent 3R stacking sequence and controlled thickness from a few to 15,000 layers. Comprehensive characterizations confirmed the large-scale uniformity, high crystallinity, and phase purity of these films. The as-grown 3R-MoS exhibited room-temperature mobilities up to 155 and 190 square centimeters per volt second for bi- and trilayers, respectively. Optical difference frequency generation with thick 3R-MoS showed markedly enhanced nonlinear response under a quasi-phase matching condition (five orders of magnitude greater than monolayers).

摘要

菱面体堆叠的过渡金属二硫属化物(3R-TMDs)与其六方对应物不同,具有更高的载流子迁移率、滑动铁电性和相干增强的非线性光学响应。然而,大面积多层3R-TMD单晶的表面外延生长很困难。我们报告了一种界面外延方法,用于生长几种成分的3R-TMDs,包括二硫化钼(MoS)、二硒化钼、二硫化钨、二硒化钨、二硫化铌、二硒化铌和硫硒化钼。将金属和硫属元素连续输送到单晶镍衬底与生长层之间的界面,确保了一致的3R堆叠顺序,并控制了从几层到15000层的厚度。综合表征证实了这些薄膜的大规模均匀性、高结晶度和相纯度。生长的3R-MoS双层和三层膜在室温下的迁移率分别高达155和190平方厘米每伏秒。厚3R-MoS的光学差频产生在准相位匹配条件下显示出明显增强的非线性响应(比单层大五个数量级)。

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