Lahav Daniel, Schultz Moty, Amrusi Shai, Grosz Asaf, Klein Lior
Department of Physics, Institute of Nanotechnology and Advanced Materials, Bar-Ilan University, Ramat-Gan 52900, Israel.
Department of Electrical and Computer Engineering, Ben-Gurion University of the Negev, P.O. Box 653, Beer-Sheva 84105, Israel.
Sensors (Basel). 2024 Jul 5;24(13):4384. doi: 10.3390/s24134384.
The magnetic field range in which a magnetic sensor operates is an important consideration for many applications. Elliptical planar Hall effect (EPHE) sensors exhibit outstanding equivalent magnetic noise (EMN) on the order of pT/Hz, which makes them promising for many applications. Unfortunately, the current field range in which EPHE sensors with pT/Hz EMN can operate is sub-mT, which limits their potential use. Here, we fabricate EPHE sensors with an increased field range and measure their EMN. The larger field range is obtained by increasing the uniaxial shape-induced anisotropy parallel to the long axis of the ellipse. We present measurements of EPHE sensors with magnetic anisotropy which ranges between 12 Oe and 120 Oe and show that their EMN at 10 Hz changes from 800 pT/Hz to 56 nT/Hz. Furthermore, we show that the EPHE sensors behave effectively as single magnetic domains with negligible hysteresis. We discuss the potential use of EPHE sensors with extended field range and compare them with sensors that are widely used in such applications.
磁传感器工作的磁场范围是许多应用中的一个重要考虑因素。椭圆平面霍尔效应（EPHE）传感器表现出出色的等效磁噪声（EMN），约为pT/Hz量级，这使其在许多应用中具有潜力。不幸的是，目前具有pT/Hz EMN的EPHE传感器能够工作的磁场范围为亚毫特斯拉，这限制了它们的潜在用途。在此，我们制造了具有更大磁场范围的EPHE传感器，并测量了它们的EMN。通过增加平行于椭圆长轴的单轴形状诱导各向异性来获得更大的磁场范围。我们展示了具有12 Oe至120 Oe磁各向异性的EPHE传感器的测量结果，并表明它们在10 Hz时的EMN从800 pT/Hz变化到56 nT/Hz。此外，我们表明EPHE传感器有效地表现为具有可忽略磁滞的单磁畴。我们讨论了具有扩展磁场范围的EPHE传感器的潜在用途，并将它们与在此类应用中广泛使用的传感器进行比较。
