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通过化学气相沉积法合成用于自供电紫外探测器的铟铝合金化氧化镓纳米线。

Synthesis of InAl-alloyed GaO nanowires for self-powered ultraviolet detectors by a CVD method.

作者信息

Li Bei, Dong Zhiyu, Xu Wei, Li Guowei, Yang Xiaozhan, Feng Shuanglong, Feng Wenlin, Lu Wenqiang

机构信息

School of Science, Chongqing University of Technology, Chongqing Key Laboratory of New Energy Storage Materials and Devices Chongqing 400054 P. R. China

Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Multiscale Manufacturing Technology Lab, Chongqing School, University of Chinese Academy of Sciences Chongqing 400714 China

出版信息

RSC Adv. 2024 Jul 19;14(32):22847-22857. doi: 10.1039/d4ra04176c.

DOI:10.1039/d4ra04176c
PMID:39035720
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11258963/
Abstract

GaO is a kind of wide-band gap semiconductor, which has great potential in deep ultraviolet detection because of its high efficiency and fast response. Doping can improve the photoelectric properties of GaO materials. In this paper, In and Al elements alloyed GaO nanowires (InAl-GaO NWs) were successfully grown on p-GaN using a cost-effective chemical vapor deposition method and a vertical structure. The GaN/InAl-GaO NWs p-n self-powered wide-gap UV photodetector (PD) was constructed based on sputtered gold film as the bottom and top electrodes, and spin coated with polymethyl methacrylate as the insulating layer in the vertical direction. The GaN/InAl-GaO UV PD exhibits excellent performances, including an extremely low dark current of 0.015 nA, a maximum photocurrent of about 16 nA at zero-bias voltage under 265 nm illumination, and a light-to-dark current ratio greater than 10. The responsivity is 0.94 mA W, the specific detectivity is 9.63 × 10 jones, and the good fast response/attenuation time is 31.2/69.6 ms. The self-powered characteristics are derived from the internal electric field formed between p-type GaN and n-type InAl-GaO NWs, which is conducive to the rapid separation and transfer of photogenerated carriers. This work provides an innovative mechanism of high-performance metal oxide nanowires for the application of p-n junction photodetectors, which can operate without any external bias.

摘要

氧化镓是一种宽带隙半导体,因其高效率和快速响应在深紫外探测方面具有巨大潜力。掺杂可以改善氧化镓材料的光电性能。本文采用经济高效的化学气相沉积法和垂直结构,在p型氮化镓上成功生长了铟和铝元素合金化的氧化镓纳米线(InAl-GaO NWs)。基于溅射金膜作为底部和顶部电极,并在垂直方向旋涂聚甲基丙烯酸甲酯作为绝缘层,构建了GaN/InAl-GaO NWs p-n自供电宽带隙紫外光电探测器(PD)。GaN/InAl-GaO紫外光电探测器表现出优异的性能,包括极低的暗电流0.015 nA、在265 nm光照下零偏压时约16 nA的最大光电流以及光暗电流比大于10。响应度为0.94 mA/W,比探测率为9.63×10琼斯,良好的快速响应/衰减时间为31.2/69.6 ms。自供电特性源于p型氮化镓和n型InAl-GaO NWs之间形成的内建电场,这有利于光生载流子的快速分离和转移。这项工作为p-n结光电探测器的应用提供了一种高性能金属氧化物纳米线的创新机制,其无需任何外部偏压即可工作。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/49f690d5f961/d4ra04176c-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/55851274c440/d4ra04176c-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/9739b2274c90/d4ra04176c-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/9174a7647d6d/d4ra04176c-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/3c01e5da58ba/d4ra04176c-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/49f690d5f961/d4ra04176c-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/55851274c440/d4ra04176c-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/9739b2274c90/d4ra04176c-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/9174a7647d6d/d4ra04176c-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/3c01e5da58ba/d4ra04176c-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0e49/11258963/49f690d5f961/d4ra04176c-f5.jpg

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本文引用的文献

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Influence of annealing pretreatment in different atmospheres on crystallization quality and UV photosensitivity of gallium oxide films.不同气氛下的退火预处理对氧化镓薄膜结晶质量和紫外光敏性的影响
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Self-catalyst β-GaO semiconductor lateral nanowire networks synthesis on the insulating substrate for deep ultraviolet photodetectors.用于深紫外光电探测器的绝缘衬底上自催化β-GaO半导体横向纳米线网络的合成。
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Ultrawide Band Gap Oxide Nanodots ( > 4.8 eV) for a High-Performance Deep Ultraviolet Photovoltaic Detector.用于高性能深紫外光伏探测器的超宽带隙氧化物纳米点(>4.8电子伏特)
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