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氮掺杂3D石墨烯推动用于逻辑电路和图像传感器的近红外光电探测器发展,克服二维材料局限性

Nitrogen-Doped 3D-Graphene Advances Near-Infrared Photodetector for Logic Circuits and Image Sensors Overcoming 2D Limitations.

作者信息

Zhang Guanglin, Wang Bingkun, Wu Huijuan, Zhang Jinqiu, Lian Shanshui, Bai Wenjun, Zhang Shan, Liu Zhiduo, Yang Siwei, Ding Guqiao, Ye Caichao, Zheng Li, Wang Gang

机构信息

Department of Microelectronic Science and Engineering, School of Physical Science and Technology, Ningbo University, Ningbo 315211, P. R. China.

Academy for Advanced Interdisciplinary Studies & Department of Materials Science and Engineering, Guangdong Provincial Key Laboratory of Computational Science and Material Design, Southern University of Science and Technology, Shenzhen, Guangdong 518055, P. R. China.

出版信息

Nano Lett. 2024 Aug 21;24(33):10062-10071. doi: 10.1021/acs.nanolett.4c01917. Epub 2024 Jul 22.

Abstract

The limitations of two-dimensional (2D) graphene in broadband photodetector are overcome by integrating nitrogen (N) doping into three-dimensional (3D) structures within silicon (Si) via plasma-assisted chemical vapor deposition (PACVD) technology. This contributes to the construction of vertical Schottky heterojunction broad-spectrum photodetectors and applications in logic devices and image sensors. The natural nanoscale resonant cavity structure of 3D-graphene enhances photon capture efficiency, thereby increasing photocarrier generation. N-doping can fine-tune the electronic structure, advancing the Schottky barrier height and reducing dark current. The as-fabricated photodetector exhibits exceptional self-driven photoresponse, especially at 1550 nm, with an excellent photoresponsivity (79.6 A/W), specific detectivity (10 Jones), and rapid response of 130 μs. Moreover, it enables logic circuits, high-resolution pattern image recognition, and broadband spectra recording across the visible to near-infrared range (400-1550 nm). This research will provide new views and technical support for the development and widespread application of high-performance semiconductor-based graphene broadband detectors.

摘要

通过等离子体辅助化学气相沉积(PACVD)技术将氮(N)掺杂集成到硅(Si)中的三维(3D)结构中,克服了二维(2D)石墨烯在宽带光电探测器中的局限性。这有助于构建垂直肖特基异质结广谱光电探测器,并应用于逻辑器件和图像传感器。3D石墨烯的天然纳米级谐振腔结构提高了光子捕获效率,从而增加了光载流子的产生。N掺杂可以微调电子结构,提高肖特基势垒高度并降低暗电流。所制备的光电探测器表现出优异的自驱动光响应,特别是在1550nm处,具有出色的光响应度(79.6A/W)、比探测率(10琼斯)和130μs的快速响应。此外,它还能实现逻辑电路、高分辨率图案图像识别以及在可见光到近红外范围(400-1550nm)的宽带光谱记录。这项研究将为高性能半导体基石墨烯宽带探测器的开发和广泛应用提供新的观点和技术支持。

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