Baris Ezgi, Tanoren Bukem, Dipcin Beste, Guzelcimen Feyza
Institute of Graduate Studies in Sciences, Istanbul University Istanbul Turkey
Department of Natural Sciences, Faculty of Engineering and Natural Sciences, Acibadem University Istanbul Turkey
RSC Adv. 2024 Aug 19;14(36):26043-26049. doi: 10.1039/d4ra05211k. eCollection 2024 Aug 16.
Both BaF and MgF compounds and Ba Mg F alloy thin films were deposited on glass and silicon (Si) substrates in nanometric sizes (100 ± 10 nm) in a high vacuum environment by radio frequency (rf) magnetron sputtering. Using BaF (99% purity) and MgF (99% purity) target materials and adjusting the power levels applied to these targets, Ba Mg F alloy coatings at different atomic concentrations were formed under the same vacuum conditions. The microstructure and surface characteristics of the samples were analysed with the help of spectroscopic and microscopic methods. For the surface characterization, with scanning acoustic microscopy (SAM), 2-dimensional surface acoustic images of the samples were mapped, the surface acoustic impedance values were determined, and information about the micro hardness of the materials was obtained. Surface roughness values and grain sizes were obtained by taking 3-dimensional surface images of investigated materials using atomic force microscopy (AFM). Average nanometric particle sizes were determined for each sample with scanning electron microscopy (SEM), therefore, information about surface homogeneity was obtained. For the microstructural characterization, quantitative elemental analysis was performed using scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM-EDS), and stoichiometric ratios of atomic compositions were identified. By evaluating the data obtained from the microscopic and spectroscopic measurements, the effect of the atomic concentration parameter on the morphological properties of the material was determined. The usability of the produced binary fluoride alloy thin film coatings is promising for emerging optoelectronic, ceramic industry, biomedical and surface acoustic wave applications.
通过射频(rf)磁控溅射,在高真空环境下将BaF和MgF化合物以及Ba - Mg - F合金薄膜沉积在玻璃和硅(Si)衬底上,薄膜尺寸为纳米级(100±10 nm)。使用纯度为99%的BaF和MgF靶材,并调整施加到这些靶材上的功率水平,在相同真空条件下形成了不同原子浓度的Ba - Mg - F合金涂层。借助光谱和显微镜方法对样品的微观结构和表面特性进行了分析。对于表面表征,使用扫描声学显微镜(SAM)绘制样品的二维表面声学图像,确定表面声阻抗值,并获得有关材料显微硬度的信息。通过使用原子力显微镜(AFM)对被研究材料拍摄三维表面图像来获得表面粗糙度值和晶粒尺寸。使用扫描电子显微镜(SEM)确定每个样品的平均纳米颗粒尺寸,从而获得有关表面均匀性的信息。对于微观结构表征,使用扫描电子显微镜/能量色散X射线光谱(SEM - EDS)进行定量元素分析,并确定原子组成的化学计量比。通过评估从显微镜和光谱测量中获得的数据,确定了原子浓度参数对材料形态特性的影响。所制备的二元氟化物合金薄膜涂层在新兴的光电子、陶瓷工业、生物医学和表面声波应用中具有广阔的应用前景。