Chen Liyang, Schmid Julian, Platek-Mielczarek Anetta, Armstrong Tobias, Schutzius Thomas M
Laboratory for Multiphase Thermofluidics and Surface Nanoengineering, Department of Mechanical and Process Engineering, ETH Zurich, Sonneggstrasse 3, CH-8092 Zurich, Switzerland.
Department of Mechanical Engineering, University of California, Berkeley, Berkeley, California 94720, United States.
ACS Appl Mater Interfaces. 2024 Sep 4;16(35):46937-46944. doi: 10.1021/acsami.4c10550. Epub 2024 Aug 20.
Precise micropatterning on three-dimensional (3D) surfaces is desired for a variety of applications, from microelectronics to metamaterials, which can be realized by transfer printing techniques. However, a nontrivial deficiency of this approach is that the transferred microstructures are adsorbed on the target surface with weak adhesion, limiting the applications to external force-free conditions. We propose a scalable "photolithography-transfer-plating" method to pattern stable and durable microstructures on 3D metallic surfaces with precise dimension and location control of the micropatterns. Surface patterning on metallic parts with different metals and isotropic and anisotropic curvatures is showcased. This method can also fabricate hierarchical structures with nanoscale vertical and microscale horizontal dimensions. The plated patterns are stable enough to mold soft materials, and the structure durability is validated by 24 h thermofluidic tests. We demonstrate micropatterned nickel electrodes for oxygen evolution reaction acceleration in hydrogen production, showing the potential of micropatterned 3D metallic surfaces for energy applications.
从微电子学到超材料，各种应用都需要在三维（3D）表面上进行精确的微图案化，这可以通过转移印刷技术来实现。然而，这种方法的一个显著缺点是，转移的微结构以较弱的附着力吸附在目标表面上，这限制了其在无外力条件下的应用。我们提出了一种可扩展的“光刻-转移-电镀”方法，用于在3D金属表面上形成具有精确尺寸和位置控制的稳定耐用的微结构。展示了在具有不同金属以及各向同性和各向异性曲率的金属部件上进行表面图案化的过程。该方法还可以制造具有纳米级垂直和微米级水平尺寸的分层结构。电镀图案足够稳定，可以用于模塑软材料，并且通过24小时热流体测试验证了结构的耐久性。我们展示了用于加速制氢中析氧反应的微图案化镍电极，展示了微图案化3D金属表面在能源应用中的潜力。
