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FS-iTFET:采用肖特基电感源和全栅极架构推进隧道场效应晶体管技术

FS-iTFET: advancing tunnel FET technology with Schottky-inductive source and GAA design.

作者信息

Lin Jyi-Tsong, Tai Wei-Heng

机构信息

Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan, ROC.

出版信息

Discov Nano. 2024 Sep 4;19(1):140. doi: 10.1186/s11671-024-04096-4.

Abstract

In this paper, we introduce a novel Forkshape nanosheet Inductive Tunnel Field-Effect Transistor (FS-iTFET) featuring a Gate-All-Around structure and a full-line tunneling heterojunction channel. The overlapping gate and source contact regions create a strong and uniform electric field in the channel. Furthermore, the metal-semiconductor Schottky junction in the intrinsic source region induces the required carriers without the need for doping. This innovative design achieves both a steeper subthreshold swing (SS) and a higher ON-state current (I). Using calibration-based simulations with Sentaurus TCAD, we compare the performance of three newly designed device structures: the conventional Nanosheet Tunnel Field-Effect Transistor (NS-TFET), the Nanosheet Line-tunneling TFET (NS-LTFET), and the proposed FS-iTFET. Simulation results show that, compared to the traditional NS-TFET, the NS-LTFET with its full line-tunneling structure improves the average subthreshold swing (SS) by 19.2%. More significantly, the FS-iTFET, utilizing the Schottky-inductive source, further improves the SS by 49% and achieves a superior I/I ratio. Additionally, we explore the impact of Trap-Assisted Tunneling on the performance of the three different integrations. The FS-iTFET consistently demonstrates superior performance across various metrics, highlighting its potential in advancing tunnel field-effect transistor technology.

摘要

在本文中,我们介绍了一种新型的叉形纳米片感应隧道场效应晶体管(FS-iTFET),它具有全方位栅极结构和全线隧穿异质结沟道。重叠的栅极和源极接触区域在沟道中产生了强大且均匀的电场。此外,本征源区中的金属 - 半导体肖特基结无需掺杂即可诱导出所需的载流子。这种创新设计实现了更陡的亚阈值摆幅(SS)和更高的导通态电流(I)。使用Sentaurus TCAD基于校准的模拟,我们比较了三种新设计的器件结构的性能:传统的纳米片隧道场效应晶体管(NS-TFET)、纳米片线隧穿TFET(NS-LTFET)和所提出的FS-iTFET。模拟结果表明,与传统的NS-TFET相比,具有全线隧穿结构的NS-LTFET将平均亚阈值摆幅(SS)提高了19.2%。更显著的是,利用肖特基感应源的FS-iTFET进一步将SS提高了49%,并实现了优异的I/I比。此外,我们探讨了陷阱辅助隧穿对三种不同集成性能的影响。FS-iTFET在各项指标上始终表现出卓越的性能,突出了其在推进隧道场效应晶体管技术方面的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/3ed72764a63b/11671_2024_4096_Fig1_HTML.jpg

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