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FS-iTFET:采用肖特基电感源和全栅极架构推进隧道场效应晶体管技术

FS-iTFET: advancing tunnel FET technology with Schottky-inductive source and GAA design.

作者信息

Lin Jyi-Tsong, Tai Wei-Heng

机构信息

Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan, ROC.

出版信息

Discov Nano. 2024 Sep 4;19(1):140. doi: 10.1186/s11671-024-04096-4.

DOI:10.1186/s11671-024-04096-4
PMID:39227488
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11371965/
Abstract

In this paper, we introduce a novel Forkshape nanosheet Inductive Tunnel Field-Effect Transistor (FS-iTFET) featuring a Gate-All-Around structure and a full-line tunneling heterojunction channel. The overlapping gate and source contact regions create a strong and uniform electric field in the channel. Furthermore, the metal-semiconductor Schottky junction in the intrinsic source region induces the required carriers without the need for doping. This innovative design achieves both a steeper subthreshold swing (SS) and a higher ON-state current (I). Using calibration-based simulations with Sentaurus TCAD, we compare the performance of three newly designed device structures: the conventional Nanosheet Tunnel Field-Effect Transistor (NS-TFET), the Nanosheet Line-tunneling TFET (NS-LTFET), and the proposed FS-iTFET. Simulation results show that, compared to the traditional NS-TFET, the NS-LTFET with its full line-tunneling structure improves the average subthreshold swing (SS) by 19.2%. More significantly, the FS-iTFET, utilizing the Schottky-inductive source, further improves the SS by 49% and achieves a superior I/I ratio. Additionally, we explore the impact of Trap-Assisted Tunneling on the performance of the three different integrations. The FS-iTFET consistently demonstrates superior performance across various metrics, highlighting its potential in advancing tunnel field-effect transistor technology.

摘要

在本文中,我们介绍了一种新型的叉形纳米片感应隧道场效应晶体管(FS-iTFET),它具有全方位栅极结构和全线隧穿异质结沟道。重叠的栅极和源极接触区域在沟道中产生了强大且均匀的电场。此外,本征源区中的金属 - 半导体肖特基结无需掺杂即可诱导出所需的载流子。这种创新设计实现了更陡的亚阈值摆幅(SS)和更高的导通态电流(I)。使用Sentaurus TCAD基于校准的模拟,我们比较了三种新设计的器件结构的性能:传统的纳米片隧道场效应晶体管(NS-TFET)、纳米片线隧穿TFET(NS-LTFET)和所提出的FS-iTFET。模拟结果表明,与传统的NS-TFET相比,具有全线隧穿结构的NS-LTFET将平均亚阈值摆幅(SS)提高了19.2%。更显著的是,利用肖特基感应源的FS-iTFET进一步将SS提高了49%,并实现了优异的I/I比。此外,我们探讨了陷阱辅助隧穿对三种不同集成性能的影响。FS-iTFET在各项指标上始终表现出卓越的性能,突出了其在推进隧道场效应晶体管技术方面的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/c512377805e2/11671_2024_4096_Fig16_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/3ed72764a63b/11671_2024_4096_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/ab1abce8df2e/11671_2024_4096_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/7ce6c8561deb/11671_2024_4096_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/5c050830755b/11671_2024_4096_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/24fbfe0d5527/11671_2024_4096_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/ef06d5a834f0/11671_2024_4096_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/0c164214a726/11671_2024_4096_Fig10_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/933bea717bbf/11671_2024_4096_Fig11_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/94420e1f418e/11671_2024_4096_Fig12_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/dfe4297a8128/11671_2024_4096_Fig13_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/84bc30987523/11671_2024_4096_Fig14_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/e90937f2d6c2/11671_2024_4096_Fig15_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/c512377805e2/11671_2024_4096_Fig16_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/3ed72764a63b/11671_2024_4096_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/ab1abce8df2e/11671_2024_4096_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/7ce6c8561deb/11671_2024_4096_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/5c050830755b/11671_2024_4096_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/24fbfe0d5527/11671_2024_4096_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/ef06d5a834f0/11671_2024_4096_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/0c164214a726/11671_2024_4096_Fig10_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/933bea717bbf/11671_2024_4096_Fig11_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/94420e1f418e/11671_2024_4096_Fig12_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/dfe4297a8128/11671_2024_4096_Fig13_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/84bc30987523/11671_2024_4096_Fig14_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/e90937f2d6c2/11671_2024_4096_Fig15_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c054/11371965/c512377805e2/11671_2024_4096_Fig16_HTML.jpg

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本文引用的文献

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Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket.在具有源极接触上重叠栅极、漏极肖特基接触和本征硅锗口袋的简单交错隧穿场效应晶体管中提高亚阈值斜率和导通电流。
Discov Nano. 2023 Sep 29;18(1):121. doi: 10.1186/s11671-023-03904-7.
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