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利用介电泳法制备垂直排列的氮化铟镓/氮化镓纳米棒发光二极管阵列

Fabrication of Vertically Aligned InGaN/GaN Nanorod Light Emitting Diode Arrays Using Dielectrophoresis.

作者信息

Cho Yeong-Hoon, Jang Pil-Kyu, Park Jiwon, Kim Sangbum, Baek Seungjae, Kim Taehwan, Uthirakumar Periyayya, Lee In-Hwan

机构信息

Department of Semiconductor Systems Engineering, Korea University, Seoul 02841, Repulic of Korea.

Department of Materials Science and Engineering, Korea University, Seoul 02841, Repulic of Korea.

出版信息

ACS Appl Mater Interfaces. 2024 Oct 23;16(42):57428-57436. doi: 10.1021/acsami.4c13836. Epub 2024 Oct 8.

DOI:10.1021/acsami.4c13836
PMID:39380175
Abstract

We report a novel strategy for vertical alignment of nanorod light emitting diodes (NRLs) by introducing dielectrophoresis (DEP) coupled with a nanohole electrode (NHE). The NHE consists of two electrodes placed at the top and the bottom separated by an insulating layer. This electrode structure allows NRLs to align within the nanoholes due to the nonuniform electric field generated across the entire region of the nanohole when a DEP voltage is applied. Our strategy involves optimizing the nanohole dimensions (diameter and height) to ensure the vertical positioning and alignment of NRLs within the nanohole, rather than laying them down horizontally. The NHE arrays with relatively large dimensions of 30 × 30 and 50 × 50 μm exhibit alignment yields of 76% and 58%, respectively. Additionally, the smaller NHE dimension of 10 × 10 μm achieves a 100% alignment yield, thereby enabling the fabrication of ultrasmall pixels. This approach represents a highly feasible direction for the precise placement of individual NRLs at a specific location, leading to the development of ultrasmall, high-resolution display pixels.

摘要

我们报告了一种通过引入介电泳(DEP)与纳米孔电极(NHE)相结合来实现纳米棒发光二极管(NRL)垂直排列的新策略。NHE由顶部和底部的两个电极组成,中间隔着一层绝缘层。当施加DEP电压时,这种电极结构会由于纳米孔整个区域产生的不均匀电场,使NRL在纳米孔内排列。我们的策略包括优化纳米孔尺寸(直径和高度),以确保NRL在纳米孔内垂直定位和排列,而不是水平放置。尺寸相对较大的30×30和50×50μm的NHE阵列,排列产率分别为76%和58%。此外,10×10μm的较小NHE尺寸实现了100%的排列产率,从而能够制造超小像素。这种方法为将单个NRL精确放置在特定位置提供了一个高度可行的方向,有助于开发超小、高分辨率的显示像素。

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