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用于硬脆材料的压电超声局部共振超精密磨削

Piezoelectric Ultrasonic Local Resonant Ultra-Precision Grinding for Hard-Brittle Materials.

作者信息

An Dawei, Xian Jianghui, Zhang Yi, Cheng Guoqiang, Huang Yankai, Liang Zhongwei, Huang Weiqing

机构信息

School of Mechanical and Electrical Engineering, Guangzhou University, Guangzhou 510006, China.

School of Computer and Information, Qiannan Normal University for Nationalities, Duyun 558000, China.

出版信息

Micromachines (Basel). 2024 Sep 29;15(10):1216. doi: 10.3390/mi15101216.

DOI:10.3390/mi15101216
PMID:39459090
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11509595/
Abstract

Hard-brittle materials are widely used in the optics, electronics, and aviation industries, but their high hardness and brittleness make it challenging for traditional processing methods to achieve high efficiency and superior surface quality. This study aims to investigate the application of ultrasonic local resonant grinding to sapphire to improve the efficiency and meet the requirements for the optical window in the surface roughness of the material. The resonant frequency of a piezoelectric ultrasonic vibration system and the vibration amplitude of a grinding head's working face were simulated and tested, respectively. The results of ultrasonic grinding experiments showed that the local resonant system reduced the surface roughness parameter (Ra) of sapphire to 14 nm and improved its surface flatness to 44.2 nm, thus meeting the requirements for the ultra-precision grinding of sapphire. Compared with a conventional resonant system, the surface roughness of the sapphire ground with the local resonant system was reduced by 90.79%, its surface flatness was improved by 81.58%, and the material removal rate was increased by 31.35%. These experimental results showed that ultrasonic local resonant grinding has better effects than those of conventional ultrasonic grinding in improving surface quality and increasing the material removal rate.

摘要

硬脆材料广泛应用于光学、电子和航空航天工业中，但其高硬度和脆性使得传统加工方法难以实现高效率和优异的表面质量。本研究旨在探讨超声局部共振磨削在蓝宝石加工中的应用，以提高加工效率并满足光学窗口材料表面粗糙度的要求。分别对压电超声振动系统的共振频率和磨头工作面的振动幅度进行了模拟和测试。超声磨削实验结果表明，局部共振系统将蓝宝石的表面粗糙度参数（Ra）降低至14nm，并将其表面平整度提高至44.2nm，从而满足了蓝宝石超精密磨削的要求。与传统共振系统相比，采用局部共振系统磨削的蓝宝石表面粗糙度降低了90.79%，表面平整度提高了81.58%，材料去除率提高了31.35%。这些实验结果表明，超声局部共振磨削在改善表面质量和提高材料去除率方面比传统超声磨削具有更好的效果。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/aaff6062337d/micromachines-15-01216-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/342da95e22e3/micromachines-15-01216-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/93a8be5916a3/micromachines-15-01216-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/dfaa2126fd62/micromachines-15-01216-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/01094cff8d2d/micromachines-15-01216-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/1bf88873143e/micromachines-15-01216-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/ea067a56e2d2/micromachines-15-01216-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/fdb4715e9a04/micromachines-15-01216-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/2241b28b7dc8/micromachines-15-01216-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/aaff6062337d/micromachines-15-01216-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/342da95e22e3/micromachines-15-01216-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/f71049bf7d84/micromachines-15-01216-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/060b9b09b8dc/micromachines-15-01216-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/93a8be5916a3/micromachines-15-01216-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/dfaa2126fd62/micromachines-15-01216-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/01094cff8d2d/micromachines-15-01216-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/1bf88873143e/micromachines-15-01216-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/ea067a56e2d2/micromachines-15-01216-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/fdb4715e9a04/micromachines-15-01216-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/2241b28b7dc8/micromachines-15-01216-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a352/11509595/aaff6062337d/micromachines-15-01216-g011.jpg

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