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CMOS图像传感器中彩色路由的逆向设计:致力于最小化像素间串扰。

Inverse design of color routers in CMOS image sensors: toward minimizing interpixel crosstalk.

作者信息

Lee Sangbin, Hong Jaehyun, Kang Joonho, Park Junjeong, Lim Jaesung, Lee Taeho, Jang Min Seok, Chung Haejun

机构信息

Department of Artificial Intelligence Semiconductor Engineering, Hanyang University, Seoul, 04763, South Korea.

Department of Electronic Engineering, Hanyang University, Seoul, 04763, South Korea.

出版信息

Nanophotonics. 2024 Jul 1;13(20):3895-3914. doi: 10.1515/nanoph-2024-0269. eCollection 2024 Aug.

Abstract

Over the past decade, significant advancements in high-resolution imaging technology have been driven by the miniaturization of pixels within image sensors. However, this reduction in pixel size to submicrometer dimensions has led to decreased efficiency in color filters and microlens arrays. The development of color routers that operate at visible wavelengths presents a promising avenue for further miniaturization. Despite this, existing color routers often encounter severe interpixel crosstalk, around 70 %, due to the reliance on periodic boundary conditions. Here, we present interpixel crosstalk-minimized color routers that achieve an unprecedented in-pixel optical efficiency of 87.2 % and significantly reduce interpixel crosstalk to 2.6 %. The color routers are designed through adjoint optimization, incorporating customized incident waves to minimize interpixel crosstalks. Our findings suggest that our color router design surpasses existing color routing techniques in terms of in-pixel optical efficiency, representing a crucial step forward in the push toward commercializing the next generation of solid-state image sensors.

摘要

在过去十年中,图像传感器内像素的小型化推动了高分辨率成像技术的重大进步。然而,像素尺寸减小到亚微米级别导致了彩色滤光片和微透镜阵列的效率降低。在可见波长下工作的颜色路由器的发展为进一步小型化提供了一条有前景的途径。尽管如此,由于依赖周期性边界条件,现有的颜色路由器经常会遇到严重的像素间串扰,约为70%。在此,我们展示了像素间串扰最小化的颜色路由器,其实现了前所未有的87.2%的像素内光学效率,并将像素间串扰显著降低至2.6%。这些颜色路由器通过伴随优化设计,结合定制的入射波以最小化像素间串扰。我们的研究结果表明,我们的颜色路由器设计在像素内光学效率方面超越了现有的颜色路由技术,代表着在推动下一代固态图像传感器商业化方面向前迈出的关键一步。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9559/11466008/27882a205fff/j_nanoph-2024-0269_fig_001.jpg

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