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用于基于塔姆等离子体激元的窄带近红外光探测的硅基平面器件。

Silicon-based planar devices for narrow-band near-infrared photodetection using Tamm plasmons.

作者信息

Liang Wenyue, Dong Yajin, Wen Long, Long Yongbing

机构信息

Institute of Nanophotonics, Jinan University, Guangzhou, 511443, China.

College of Electronic Engineering, South China Agricultural University, Guangzhou, 510642, China.

出版信息

Nanophotonics. 2024 Apr 18;13(16):2961-2970. doi: 10.1515/nanoph-2024-0062. eCollection 2024 Jul.

Abstract

Designing efficient narrow-band near-infrared photodetectors integrated on silicon for telecommunications remains a significant challenge in silicon photonics. This paper proposes a novel silicon-based hot-electron photodetector employing Tamm plasmons (Si-based TP-HE PD) for narrow-band near-infrared photodetection. The device combines a one-dimensional photonic crystal (1DPC) structure, an Au layer, and a silicon substrate with a back electrode. Simulation results show that the absorption of the TP device with a back electrode is 1.5 times higher than without a back electrode, due to increased absorption from multiple reflections between the back electrode and the 1DPC structure. Experimentally, the responsivity of the fabricated device reaches 0.195 mA/W at a wavelength of 1400 nm. A phenomenological model was developed to analyze the photoelectric conversion mechanism, revealing reasonable agreement between the theoretically calculated and experimentally measured internal quantum efficiencies. Additional experiments and simulations demonstrate the tunability of the resonance wavelength from 1200 nm to 1700 nm by adjusting structural parameters. The Si-based TP-HE PD shows potential for silicon-based optoelectronic applications, offering the advantages of a simple structure, low cost, and compatibility with silicon photonic integrated circuits. This work represents the first demonstration of a silicon-based hot electron NIR photodetector utilizing Tamm plasmons.

摘要

设计集成在硅上用于电信的高效窄带近红外光电探测器仍然是硅光子学中的一项重大挑战。本文提出了一种采用塔姆等离子体激元的新型硅基热电子光电探测器(基于硅的TP-HE PD)用于窄带近红外光探测。该器件将一维光子晶体(1DPC)结构、金层和带有背电极的硅衬底结合在一起。模拟结果表明,带有背电极的TP器件的吸收率比没有背电极的高出1.5倍,这是由于背电极和1DPC结构之间多次反射导致的吸收增加。实验上,所制备器件在1400 nm波长处的响应度达到0.195 mA/W。建立了一个唯象模型来分析光电转换机制,结果表明理论计算和实验测量的内量子效率之间具有合理的一致性。额外的实验和模拟表明,通过调整结构参数,共振波长可在1200 nm至1700 nm之间可调。基于硅的TP-HE PD在基于硅的光电子应用中显示出潜力,具有结构简单、成本低以及与硅光子集成电路兼容的优点。这项工作首次展示了利用塔姆等离子体激元的硅基热电子近红外光电探测器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6afc/11502038/19c8ba58f596/j_nanoph-2024-0062_fig_001.jpg

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