具有抗振动和抗冲击性能的盘式谐振陀螺仪的设计、制造与特性分析

Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance.

作者信息

Zhai Zhaoyang, Bie Xiaorui, Zhu Bingchen, Qi Zhenxiang, Wang Bowen, Wang Kunfeng, Zou Xudong

机构信息

The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2024 Nov 26;24(23):7553. doi: 10.3390/s24237553.

DOI:10.3390/s24237553

PMID:39686090

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11644445/

Abstract

This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, enhancing sensitivity and reducing the angle random walk (ARW). The performance of the proposed DRG is analyzed using dynamic equations, and its structural parameters are optimized through finite element analysis (FEA). The prototype device was fabricated using a two-mask silicon-on-insulator (SOI) process on (100) single-crystal silicon (SCS), which is better suited for complementary metal-oxide-semiconductor (CMOS) integration compared to (111) SCS. Experimental results show an ARW of 0.63°/h and a bias instability (BI) of 7.7°/h, with no significant performance degradation observed under vibrational environments, indicating potential for tactical-grade performance.

摘要

本文提出了一种外框架锚盘谐振式陀螺仪（DRG）的全面优化方案，通过提高桶形和平移模式的谐振频率来增强其抗振动和抗冲击能力。此外，酒杯模式保持了高品质因数，提高了灵敏度并降低了角度随机游走（ARW）。使用动力学方程分析了所提出的DRG的性能，并通过有限元分析（FEA）对其结构参数进行了优化。原型器件是在（100）单晶硅（SCS）上采用双掩膜绝缘体上硅（SOI）工艺制造的，与（111）SCS相比，它更适合互补金属氧化物半导体（CMOS）集成。实验结果表明，ARW为0.63°/h，偏置不稳定性（BI）为7.7°/h，在振动环境下未观察到明显的性能下降，表明具有战术级性能的潜力。