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ATLAS-MAP:一种用于门控电子输运测量的自动测试站。

ATLAS-MAP: An Automated Test Station for Gated Electronic Transport Measurements.

作者信息

Walton Amber, Manno Michael, Dauenhauer Paul J, Frisbie C Daniel, McDonald Daniel

机构信息

Department of Chemical Engineering and Materials Science, University of Minnesota, 421 Washington Ave. SE, Minneapolis 55455, Minnesota, United States.

Department of Chemical Engineering and Materials Science, Center for Programmable Energy Catalysis, University of Minnesota, 421 Washington Ave. SE, Minneapolis 55455, Minnesota, United States.

出版信息

ACS Meas Sci Au. 2024 Sep 27;4(6):659-667. doi: 10.1021/acsmeasuresciau.4c00034. eCollection 2024 Dec 18.

Abstract

The diversification of electronic materials in devices provides a strong incentive for methods to rapidly correlate device performance with fabrication decisions. In this work, we present a low-cost automated test station for gated electronic transport measurements of field-effect transistors. Utilizing open-source PyMeasure libraries for transparent instrument control, the "ATLAS-MAP" system serves as a customizable interface between sourcemeters and samples under test and is programmed to conduct transfer curve and van der Pauw methods with static and sweeping gate voltages. Zinc oxide transistors of variable thickness (5, 10, and 20 nm) and channel size (50 μm to 3 mm, of equal length and width) were fabricated to validate the design. Standardization of testing procedures and raw data formatting enabled automated data analysis. A detailed list of parts and code files for the system are provided.

摘要

器件中电子材料的多样化为快速将器件性能与制造决策相关联的方法提供了强大的动力。在这项工作中,我们展示了一个用于场效应晶体管门控电子输运测量的低成本自动化测试站。利用开源的PyMeasure库进行透明仪器控制,“ATLAS - MAP”系统作为源表和被测样品之间的可定制接口,并被编程为在静态和扫描栅极电压下进行转移曲线和范德堡方法。制备了可变厚度(5、10和20纳米)和沟道尺寸(50微米至3毫米,长宽相等)的氧化锌晶体管以验证该设计。测试程序和原始数据格式化的标准化实现了自动化数据分析。提供了该系统的详细零件清单和代码文件。

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