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大晶格失配衬底上 InN 纳米结构的分子束外延生长及光学性质

Molecular Beam Epitaxial Growth and Optical Properties of InN Nanostructures on Large Lattice-Mismatched Substrates.

作者信息

Nie Rongtao, Hu Yifan, Wu Guoguang, Li Yapeng, Chen Yutong, Nie Haoxin, Wang Xiaoqiu, Ren Mengmeng, Li Guoxing, Zhang Yuantao, Zhang Baolin

机构信息

State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.

出版信息

Materials (Basel). 2024 Dec 18;17(24):6181. doi: 10.3390/ma17246181.

Abstract

Narrow-gap InN is a desirable candidate for near-infrared (NIR) optical communication applications. However, the absence of lattice-matched substrates impedes the fabrication of high-quality InN. In this paper, we employed Molecular Beam Epitaxy (MBE) to grow nanostructured InN with distinct growth mechanisms. Morphological and quality analysis showed that the liquid phase epitaxial (LPE) growth of hexagonal InN nanopillar could be realized by depositing molten In layer on large lattice-mismatched sapphire substrate; nevertheless, InN nanonetworks were formed on nitrided sapphire and GaN substrates through the vapor-solid process under the same conditions. The supersaturated precipitation of InN grains from the molten In layer effectively reduced the defects caused by lattice mismatch and suppressed the introduction of non-stoichiometric metal In in the epitaxial InN. Photoluminescence and electrical characterizations demonstrated that high-carrier concentration InN prepared by vapor-solid mechanism showed much stronger band-filling effect at room temperature, which significantly shifted its PL peak to higher energy. LPE InN displayed the strongest PL intensity and the smallest wavelength shift with increasing temperature from 10 K to 300 K. These results showed enhanced optical properties of InN nanostructures prepared on large lattice mismatch substrates, which will play a crucial role in near-infrared optoelectronic devices.

摘要

窄带隙氮化铟是近红外(NIR)光通信应用的理想候选材料。然而,缺乏晶格匹配的衬底阻碍了高质量氮化铟的制备。在本文中,我们采用分子束外延(MBE)技术生长具有不同生长机制的纳米结构氮化铟。形态学和质量分析表明,通过在大晶格失配的蓝宝石衬底上沉积熔融铟层,可以实现六方氮化铟纳米柱的液相外延(LPE)生长;然而,在相同条件下,通过气固过程在氮化蓝宝石和氮化镓衬底上形成了氮化铟纳米网络。熔融铟层中氮化铟晶粒的过饱和沉淀有效地减少了由晶格失配引起的缺陷,并抑制了外延氮化铟中非化学计量比金属铟的引入。光致发光和电学表征表明,通过气固机制制备的高载流子浓度氮化铟在室温下表现出更强的带填充效应,这使其PL峰显著向更高能量移动。随着温度从10 K升高到300 K,LPE氮化铟显示出最强的PL强度和最小的波长偏移。这些结果表明,在大晶格失配衬底上制备的氮化铟纳米结构具有增强的光学性能,这将在近红外光电器件中发挥关键作用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/530c/11676283/b143b9363c0b/materials-17-06181-g001.jpg

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