• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

多探测器同平台激光陀螺反射镜基板缺陷检测样机的结构设计与仿真

Structural Design and Simulation of Multi-Detector Same-Platform Laser Gyro Reflector Substrate Defect Detection Prototype.

作者信息

Wang Jun, Li Zhenyang, Song Maoxin, Xu Zhilong, Luo Huan, Ling Mingchun, Qin Hengwei, Liu Wuhao, Liu Zhenhai, Hong Jin

机构信息

University of Science and Technology of China, Hefei 230026, China.

Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China.

出版信息

Micromachines (Basel). 2024 Dec 15;15(12):1498. doi: 10.3390/mi15121498.

DOI:10.3390/mi15121498
PMID:39770251
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11680040/
Abstract

Defect detection and classification in super-high reflector mirrors and their substrates are crucial for manufacturing laser gyroscope systems. This paper presents a prototype designed to meet the requirements for the reflection and transmission of laser gyroscope mirror substrates. The prototype featured two measurement channels (bright field and dark field) and could detect defects on patterned and unpatterned surfaces. Key components were simulated using Ansys software, (Ansys Workbench 2022 R1)which showed a maximum static deformation of 4.65 μm, a resonant frequency of at least around 230 Hz, and a maximum stress of 9.86 MPa under transportation conditions (GJB150.16A-2009). These results confirm the prototype's stability for optical performance testing and structural design. The experimental testing on laser gyroscope reflector substrates and USAF 1951 plates demonstrated that the prototype effectively detected defects on reflection and transmission surfaces, with a detection resolution that exceeded 170 nm, which met the design requirements.

摘要

超高速反射镜及其基板中的缺陷检测和分类对于激光陀螺仪系统的制造至关重要。本文介绍了一种为满足激光陀螺仪镜基板的反射和透射要求而设计的原型。该原型具有两个测量通道（明场和暗场），可以检测有图案和无图案表面上的缺陷。使用Ansys软件（Ansys Workbench 2022 R1）对关键部件进行了模拟，结果表明在运输条件下（GJB150.16A-2009），最大静态变形为4.65μm，共振频率至少约为230Hz，最大应力为9.86MPa。这些结果证实了该原型在光学性能测试和结构设计方面的稳定性。对激光陀螺仪反射镜基板和美国空军1951板的实验测试表明，该原型有效地检测了反射和透射表面上的缺陷，检测分辨率超过170nm，满足设计要求。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/edb64d78c47d/micromachines-15-01498-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/04e74f498fe7/micromachines-15-01498-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/2ebe4c2291be/micromachines-15-01498-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/f826706d83fa/micromachines-15-01498-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/f34d97dc6459/micromachines-15-01498-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/ee9e31861169/micromachines-15-01498-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/20e420cf8e9c/micromachines-15-01498-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/9d424ebf05b6/micromachines-15-01498-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/58374bdc9185/micromachines-15-01498-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/3d448e46cd2e/micromachines-15-01498-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/ff1754d9c495/micromachines-15-01498-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/edb64d78c47d/micromachines-15-01498-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/04e74f498fe7/micromachines-15-01498-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/2ebe4c2291be/micromachines-15-01498-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/f826706d83fa/micromachines-15-01498-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/f34d97dc6459/micromachines-15-01498-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/ee9e31861169/micromachines-15-01498-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/20e420cf8e9c/micromachines-15-01498-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/9d424ebf05b6/micromachines-15-01498-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/58374bdc9185/micromachines-15-01498-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/3d448e46cd2e/micromachines-15-01498-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/ff1754d9c495/micromachines-15-01498-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/482e/11680040/edb64d78c47d/micromachines-15-01498-g011.jpg

相似文献

1
Structural Design and Simulation of Multi-Detector Same-Platform Laser Gyro Reflector Substrate Defect Detection Prototype.多探测器同平台激光陀螺反射镜基板缺陷检测样机的结构设计与仿真
Micromachines (Basel). 2024 Dec 15;15(12):1498. doi: 10.3390/mi15121498.
2
Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype.一种多通道双工况晶圆缺陷检测样机的结构设计与仿真
Micromachines (Basel). 2023 Aug 7;14(8):1568. doi: 10.3390/mi14081568.
3
Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope.一款CMOS-MEMS平面外检测陀螺仪的设计与实现
Micromachines (Basel). 2024 Dec 10;15(12):1484. doi: 10.3390/mi15121484.
4
Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners.双轴压电微机电系统扫描仪的热行为
Sensors (Basel). 2023 Nov 30;23(23):9538. doi: 10.3390/s23239538.
5
Reshaping Field of View and Resolution with Segmented Reflectors: Bridging the Gap Between Rotating and Solid-State LiDARs.使用分段反射器重塑视野和分辨率：弥合旋转式和固态激光雷达之间的差距。
Sensors (Basel). 2020 Jun 15;20(12):3388. doi: 10.3390/s20123388.
6
Design a New Type of Laser Cladding Nozzle and Thermal Fluid Solid Multi-Field Simulation Analysis.新型激光熔覆喷嘴的设计及热流固多场模拟分析
Materials (Basel). 2021 Sep 10;14(18):5196. doi: 10.3390/ma14185196.
7
Precision Angle Measurement Systems on the Basis of Ring Laser Gyro.基于环形激光陀螺仪的精密角度测量系统
Sensors (Basel). 2020 Dec 4;20(23):6930. doi: 10.3390/s20236930.
8
Automatic detection of quartz glass subsurface defects by laser scattering method based on an ellipsoidal mirror.基于椭球面镜的激光散射法自动检测石英玻璃亚表面缺陷
Appl Opt. 2024 Apr 1;63(10):2578-2586. doi: 10.1364/AO.514950.
9
Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope.新型轮辐三轴陀螺仪的设计与制造。
Sensors (Basel). 2022 Dec 18;22(24):9978. doi: 10.3390/s22249978.
10
An edge-readout, multilayer detector for positron emission tomography.一种正电子发射断层成像的边沿读出式多层探测器。
Med Phys. 2018 Jun;45(6):2425-2438. doi: 10.1002/mp.12906. Epub 2018 May 6.

本文引用的文献

1
Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype.一种多通道双工况晶圆缺陷检测样机的结构设计与仿真
Micromachines (Basel). 2023 Aug 7;14(8):1568. doi: 10.3390/mi14081568.
2
Defect Inspection Techniques in SiC.碳化硅中的缺陷检测技术
Nanoscale Res Lett. 2022 Mar 4;17(1):30. doi: 10.1186/s11671-022-03672-w.
3
Automatic optical inspection platform for real-time surface defects detection on plane optical components based on semantic segmentation.基于语义分割的平面光学元件表面缺陷实时自动光学检测平台。
Appl Opt. 2021 Jul 1;60(19):5496-5506. doi: 10.1364/AO.424547.
4
Classification between digs and dust particles on optical surfaces with acquisition and analysis of polarization characteristics.通过获取和分析偏振特性对光学表面上的挖掘痕迹和灰尘颗粒进行分类。
Appl Opt. 2019 Feb 1;58(4):1073-1083. doi: 10.1364/AO.58.001073.
5
Determination of the diameter of an isolated surface defect based on Fraunhofer diffraction.
Appl Opt. 1980 May 1;19(9):1435-8. doi: 10.1364/AO.19.001435.
6
Structural ( n, m) determination of isolated single-wall carbon nanotubes by resonant Raman scattering.通过共振拉曼散射确定孤立单壁碳纳米管的结构（n，m）
Phys Rev Lett. 2001 Feb 5;86(6):1118-21. doi: 10.1103/PhysRevLett.86.1118.