Wang Qingyi, Zhang Yang, Cheng Sizhe, Wang Xianyang, Wu Shengjun, Liu Xufeng
School of Basic Medicine, Air Force Medical University, Xi'an 710032, China.
School of Military Medical Psychology, Air Force Medical University, Xi'an 710032, China.
Micromachines (Basel). 2024 Dec 30;16(1):43. doi: 10.3390/mi16010043.
MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal's information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices.
MEMS声学传感器是一种基于MEMS制造技术的物理量传感器，用于检测声波。它们利用诸如薄膜、悬臂梁或纤毛等各种敏感结构来收集声能，并使用特定的转换原理读出产生的应变，从而获得目标声信号的信息，如强度、方向和分布。由于其在小型化、低功耗、高精度、高一致性、高重复性、高可靠性和易于集成方面的优势，MEMS声学传感器广泛应用于许多领域，如消费电子、工业感知、军事装备和健康监测。通过不同的传感机制，它们可用于检测声能密度、声压分布和声波方向。本文重点介绍压电、压阻、电容和光学MEMS声学传感器，展示它们近年来的发展以及在结构、工艺和设计方法方面的创新。然后，本综述比较了具有相似工作原理的器件的性能。MEMS声学传感器已越来越广泛地应用于各个领域，包括麦克风、听诊器、水听器和超声成像等传统优势领域，以及生物医学可穿戴和植入式设备等前沿领域。
