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通过光相位变化轻松实现单层二硫化钼中空间分辨折射率调制的投影

Facile Projection of Spatially Resolved Refractive Index Modulation in Monolayer MoS via Light Phase Changes.

作者信息

Han Yoojoong, Lee Moonsang, Yun Seok Joon, Kim Ju Young, Kim Goohwan, Gutiérrez Humberto R, Son Hyungbin, Kim Un Jeong

机构信息

School of Integrative Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea.

Department of Materials Science and Engineering, Inha University, 100, Inha-ro, Michuhol-gu, Incheon, 22212, Republic of Korea.

出版信息

Small. 2025 Jun;21(23):e2501998. doi: 10.1002/smll.202501998. Epub 2025 Apr 14.

Abstract

Fast spatial contouring of the complex refractive index (n  +  ik) of semiconducting materials is a much sought-after goal since the advent of semiconductor-related industries. This study develops a novel metrology to shape the refractive index modulation of materials using hyperspectral phase microscopy by maximizing the light-matter interaction of physical properties. The facile, non-destructive, and wide-field hyperspectral phase technique realizes efficient visualization of the spatially resolved refractive index nature induced by strain within and among examined MoS materials. Furthermore, numerical analyses based on a steady-state transfer matrix clarify that the spectral phase difference (Δϕ) is selectively sensitive to the modulation of refractive index (n) but not of extinction coefficient (k) under certain wavelength ranges. This dependence is associated with wavelength and the thickness of the dielectric layer on the substrates. Simple linear relation between n and Δϕ for ≈100 nm of SiO, dielectric material supporting MoS, enables to visualize the excitonic A and B band modulation, and furthermore, refractive index with fairly high precision (coefficient of determination, R > 0.97 in the wavelength range of 530-630 nm).

摘要

自半导体相关产业出现以来,快速对半导体材料的复折射率(n + ik)进行空间轮廓测量一直是备受追求的目标。本研究开发了一种新颖的计量方法,通过最大化物理性质的光与物质相互作用,利用高光谱相显微镜来塑造材料的折射率调制。这种简便、无损且宽视场的高光谱相技术实现了对所研究的MoS材料内部和之间由应变引起的空间分辨折射率特性的有效可视化。此外,基于稳态转移矩阵的数值分析表明,在特定波长范围内,光谱相位差(Δϕ)对折射率(n)的调制具有选择性敏感性,而对消光系数(k)的调制不敏感。这种依赖性与波长以及衬底上介电层的厚度有关。对于支撑MoS的约100 nm SiO介电材料,n与Δϕ之间的简单线性关系能够实现对激子A和B带调制的可视化,进而以相当高的精度(在530 - 630 nm波长范围内,决定系数R > 0.97)可视化折射率。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/776a/12160670/364047facd69/SMLL-21-2501998-g002.jpg

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