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用于无制冷红外探测的外延膜原子剥离

Atomic lift-off of epitaxial membranes for cooling-free infrared detection.

作者信息

Zhang Xinyuan, Ericksen Owen, Lee Sangho, Akl Marx, Song Min-Kyu, Lan Haihui, Pal Pratap, Suh Jun Min, Lindemann Shane, Ryu Jung-El, Shao Yanjie, Zheng Xudong, Han Ne Myo, Bhatia Bikram, Kim Hyunseok, Kum Hyun S, Chang Celesta S, Shi Yunfeng, Eom Chang-Beom, Kim Jeehwan

机构信息

Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.

Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, WI, USA.

出版信息

Nature. 2025 May;641(8061):98-105. doi: 10.1038/s41586-025-08874-7. Epub 2025 Apr 23.

Abstract

Recent breakthroughs in ultrathin, single-crystalline, freestanding complex oxide systems have sparked industry interest in their potential for next-generation commercial devices. However, the mass production of these ultrathin complex oxide membranes has been hindered by the challenging requirement of inserting an artificial release layer between the epilayers and substrates. Here we introduce a technique that achieves atomic precision lift-off of ultrathin membranes without artificial release layers to facilitate the high-throughput production of scalable, ultrathin, freestanding perovskite systems. Leveraging both theoretical insights and empirical evidence, we have identified the pivotal role of lead in weakening the interface. This insight has led to the creation of a universal exfoliation strategy that enables the production of diverse ultrathin perovskite membranes less than 10 nm. Our pyroelectric membranes demonstrate a record-high pyroelectric coefficient of 1.76 × 10 C m K, attributed to their exceptionally low thickness and freestanding nature. Moreover, this method offers an approach to manufacturing cooling-free detectors that can cover the full far-infrared spectrum, marking a notable advancement in detector technology.

摘要

超薄单晶自支撑复合氧化物体系的最新突破引发了业界对其在下一代商业设备中潜力的兴趣。然而,这些超薄复合氧化物膜的大规模生产受到在外延层和衬底之间插入人工释放层这一具有挑战性要求的阻碍。在此,我们介绍一种技术,该技术可实现无人工释放层的超薄膜的原子级精确剥离,以促进可扩展的超薄自支撑钙钛矿体系的高通量生产。利用理论见解和经验证据,我们确定了铅在弱化界面方面的关键作用。这一见解促成了一种通用的剥离策略的创建,该策略能够生产出厚度小于10纳米的各种超薄钙钛矿膜。我们的热释电膜展现出创纪录的1.76×10⁻⁵C m⁻²K⁻¹的热释电系数,这归因于其极低的厚度和自支撑特性。此外,该方法提供了一种制造可覆盖整个远红外光谱的无制冷探测器的途径,标志着探测器技术取得了显著进展。

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