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静电微机电系统（MEMS）的谐振驱动技术：一项对比研究。

Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study.

作者信息

Abdelrahman Rana, Elhady Alaaeldin, Shama Yasser S, Abdelrahman Mohamed, Jollivet Alexis, Ozyigit Dogu, Yavuz Mustafa, Abdel-Rahman Eihab M

机构信息

Systems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.

Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada.

出版信息

Sensors (Basel). 2025 Mar 10;25(6):1719. doi: 10.3390/s25061719.

DOI:10.3390/s25061719
PMID:40292831
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11944924/
Abstract

Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is limited in gain, especially at high frequencies. Various methods have been proposed to amplify the voltage signal fed into the system by coupling it in series to an LC tank circuit. In this work, we analyze and compare three methods, resonance matching, multi-frequency excitation, and amplitude modulation. We also compare their performance to that of a voltage amplifier. We demonstrate that resonant circuits significantly enhance performance, offering a more effective solution for high-frequency MEMS actuation.

摘要

由于其独特的优势，静电驱动在微机电系统（MEMS）中得到了广泛应用。然而，它需要高电压，通常由电源和高压放大器提供，而高压放大器的增益有限，尤其是在高频时。已经提出了各种方法，通过将输入系统的电压信号与LC谐振电路串联耦合来放大该信号。在这项工作中，我们分析并比较了三种方法：谐振匹配、多频激励和幅度调制。我们还将它们的性能与电压放大器的性能进行了比较。我们证明，谐振电路显著提高了性能，为高频MEMS驱动提供了一种更有效的解决方案。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/97725883dd15/sensors-25-01719-g024.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/e089cfef7ea7/sensors-25-01719-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/bb825abb903e/sensors-25-01719-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/d92423b56c3d/sensors-25-01719-g021.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/4ff1f58f5781/sensors-25-01719-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/b0f594912d36/sensors-25-01719-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/f03379fa8006/sensors-25-01719-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/8caa37b17991/sensors-25-01719-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/e089cfef7ea7/sensors-25-01719-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/bb825abb903e/sensors-25-01719-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/d92423b56c3d/sensors-25-01719-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/cddb49052a81/sensors-25-01719-g022.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f287/11944924/97725883dd15/sensors-25-01719-g024.jpg

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本文引用的文献

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Unraveling the nature of sensing in electrostatic MEMS gas sensors.解析静电微机电系统气体传感器的传感本质。
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