Jaber N, Hafiz M A A, Kazmi S N R, Hasan M H, Alsaleem F, Ilyas S, Younis M I
Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia.
Durham School of Architectural Engineering and Construction, University of Nebraska Lincoln, Lincoln, Nebraska, 68182-0816, USA.
Sci Rep. 2019 Jan 22;9(1):319. doi: 10.1038/s41598-018-36482-1.
We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.
我们展示了一种简单且灵活的技术，可在微/纳机电系统（MEMS/NEMS）谐振器的基模和高阶振动模式下高效激活它们。该方法基于利用LC谐振回路中电感L两端的放大电压来驱动MEMS/NEMS谐振器。通过匹配电气和机械共振，据报道谐振器两端会出现显著的振幅放大。我们通过实验展示了高达12倍的振幅放大，这被证明能有效激发微板MEMS谐振器的几种振动模式以及NEMS谐振器的基模。
