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保护环对沟槽隔离低增益雪崩二极管中自感应信号和漏电流的影响。

Impact of the Guard Rings on Self-Induced Signal and Leakage Current in Trench-Isolated Low Gain Avalanche Diodes.

作者信息

Lastovicka-Medin Gordana, Kramberger Gregor, Kroll Jiri, Rebarz Mateusz

机构信息

Faculty of Natural Sciences and Mathematics, University of Montenegro, Dzordza Vashingtona, 81000 Podgorica, Montenegro.

Jozef Stefan Institute, Jamova Cesta 39, 1000 Ljubljana, Slovenia.

出版信息

Sensors (Basel). 2025 May 10;25(10):3006. doi: 10.3390/s25103006.

Abstract

In this contribution, we explored the interplay of guard ring (GR) configuration and isolation structures, as well as irradiation effects, which all together create a rich landscape of phenomena such as self-induced signals ("ghosts") in trench-isolated Low-Gain Avalanche Diodes (TI-LGADs). The ghost effect is related to the increased surface current due to presence of SiO trenches (and defects) in studied diodes, but it is also affected by interplay between the guard ring(s) and the n bias ring, implanted in inter-pixel region of these devices. In double-trenched sensors, the n bias ring is inserted in between the two trenches. We present the investigation on the role of these structures on the self-induced signals in trench-isolated sensors from two different productions (RD50 and AIDAinnova). The sensors from the first production have multiple guard rings, whereas the second type of devices feature only one. Detailed examination of the ghost effect and leak current was performed when guard rings were left floating or connected to the pixels (brought to the same potential). The results show that guard ring configuration in trenched sensors can be critical for the leak current and the presence of a ghost signal. To our best knowledge, the latter problem has not been investigated yet.

摘要

在本论文中,我们研究了保护环(GR)配置与隔离结构之间的相互作用,以及辐照效应,这些因素共同构成了丰富的现象图景,比如在沟槽隔离低增益雪崩二极管(TI-LGAD)中出现的自感应信号(“鬼信号”)。鬼信号效应与所研究二极管中由于SiO沟槽(以及缺陷)的存在而导致的表面电流增加有关,但它也受到保护环与植入这些器件像素间区域的n偏置环之间相互作用的影响。在双沟槽传感器中,n偏置环插入在两个沟槽之间。我们展示了对来自两种不同生产批次(RD50和AIDAinnova)的沟槽隔离传感器中这些结构对自感应信号作用的研究。第一批生产的传感器有多个保护环,而第二类器件只有一个保护环。当保护环处于浮空状态或连接到像素(处于相同电位)时,对鬼信号效应和漏电流进行了详细研究。结果表明,沟槽传感器中的保护环配置对于漏电流和鬼信号的存在可能至关重要。据我们所知,后一个问题尚未得到研究。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2011/12115024/0e4ad05cc3c2/sensors-25-03006-g001.jpg

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