Li Jinchun, Xie Zhixiang, Zhao Tianxiang, Li Hongliang, Wu Di, Yu Xuechao
Key Laboratory of Materials Physics, Ministry of Education, School of Physics, Zhengzhou University, Zhengzhou 450001, China.
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China.
Nanomaterials (Basel). 2025 Jun 12;15(12):913. doi: 10.3390/nano15120913.
Transition metal dichalcogenide (TMD) materials have demonstrated promising potential for applications in photodetection due to their tunable bandgaps, high carrier mobility, and strong light absorption capabilities. However, limited by their intrinsic bandgaps, TMDs are unable to efficiently absorb photons with energies below the bandgap, resulting in a significant attenuation of photoresponse in spectral regions beyond the bandgap. This inherently restricts their broadband photodetection performance. By introducing metasurface structures consisting of subwavelength optical elements, localized plasmon resonance effects can be exploited to overcome this absorption limitation, significantly enhancing the light absorption of TMD films. Additionally, the heterogeneous integration process between the metasurface and two-dimensional materials offers low-temperature compatibility advantages, effectively avoiding the limitations imposed by high-temperature doping processes in traditional semiconductor devices. Here, we systematically investigate metasurface-enhanced two-dimensional MoSe photodetectors, demonstrating broadband responsivity extension into the mid-infrared spectrum via precise control of metasurface structural dimensions. The optimized device possesses a wide spectrum response ranging from 808 nm to 10 μm, and the responsivity () and specific detection rate () under 4 μm illumination achieve 7.1 mA/W and 1.12 × 10 Jones, respectively. Distinct metasurface configurations exhibit varying impacts on optical absorption characteristics and detection spectral ranges, providing experimental foundations for optimizing high-performance photodetectors. This work establishes a practical pathway for developing broadband optoelectronic devices through nanophotonic structure engineering.
过渡金属二硫属化物(TMD)材料因其可调节的带隙、高载流子迁移率和强光吸收能力,在光电探测应用中展现出了广阔的潜力。然而,受其固有带隙的限制,TMD无法有效吸收能量低于带隙的光子,导致在带隙以外的光谱区域光响应显著衰减。这从本质上限制了它们的宽带光电探测性能。通过引入由亚波长光学元件组成的超表面结构,可以利用局域表面等离子体共振效应来克服这种吸收限制,显著增强TMD薄膜的光吸收。此外,超表面与二维材料之间的异质集成过程具有低温兼容性优势,有效避免了传统半导体器件中高温掺杂工艺带来的限制。在此,我们系统地研究了超表面增强的二维MoSe光电探测器,通过精确控制超表面结构尺寸,证明了宽带响应延伸至中红外光谱。优化后的器件具有从808 nm到10 μm的宽光谱响应,在4 μm光照下的响应度()和比探测率()分别达到7.1 mA/W和1.12×10 Jones。不同的超表面配置对光吸收特性和探测光谱范围有不同的影响,为优化高性能光电探测器提供了实验基础。这项工作通过纳米光子结构工程为开发宽带光电器件建立了一条切实可行的途径。