Jang Nayoung, Kwon Young Ha, Seong Nak-Jin, Choi Kyujeong, Yoon Sung-Min
Department of Materials Science and Engineering, Kyung Hee University, Yongin, Gyeonggi-do 17104, Korea.
NCD Co., Ltd, Daejeon 34015, Korea.
ACS Appl Mater Interfaces. 2025 Jul 16;17(28):40788-40797. doi: 10.1021/acsami.5c09127. Epub 2025 Jul 2.
In order to address the limitations of conventional von Neumann architectures in terms of deep neural networks, neuromorphic computing has been proposed as a potential solution. In particular, the emulation of synaptic characteristics represents a significant challenge in the field of high-performance, compact, and energy-efficient device design. From this perspective, a highly effective fabrication engineering approach has been employed to demonstrate 40 nm short-channel vertical synapse thin film transistors (VS-TFTs) that utilize HfO spacer layers, thereby effectively achieving a compact footprint. A channel length of 40 nm was reliably achieved by employing HfO as a spacer material. In addition, the implementation of oxide semiconductor InGaZnO channels and inorganic HfO electrolyte-gated insulators (EGIs) has led to the successful attainment of two primary objectives: low off-state currents and stable device characteristics. In this work, devices employing conventional AlO gate insulators were fabricated, to validate the introduction of the HfO spacer. These devices exhibited a current drivability of 5.6 μA/μm and an on/off ratio of 4.6 × 10, respectively. The VS-TFTs with inorganic HfO EGIs exhibited the successful expression of essential synaptic characteristics, including excitatory/inhibitory postsynaptic currents, paired-pulse facilitation, and long-term plasticity (LTP) through the modulation of the applied pulse conditions. The duration of LTP was defined as 10% of the initial value and was obtained to be 22 s. Linearities were extracted from 50 consecutive potentiation and depression pulses, yielding values of 0.95 and 1.14, respectively. Additionally, the energy consumption measured under specified drain voltage conditions was found to be 1.27 fJ, exhibiting a satisfactory signal-to-noise ratio. This development signifies a substantial advancement for neuromorphic hardware systems.
为了克服传统冯·诺依曼架构在深度神经网络方面的局限性,神经形态计算被提出作为一种潜在的解决方案。特别是,突触特性的模拟在高性能、紧凑且节能的器件设计领域是一项重大挑战。从这个角度来看,一种高效的制造工程方法已被用于展示利用HfO间隔层的40纳米短沟道垂直突触薄膜晶体管(VS-TFT),从而有效地实现了紧凑的尺寸。通过使用HfO作为间隔材料,可靠地实现了40纳米的沟道长度。此外,氧化物半导体InGaZnO沟道和无机HfO电解质门控绝缘体(EGI)的实现成功达成了两个主要目标:低关态电流和稳定的器件特性。在这项工作中,制造了采用传统AlO栅极绝缘体的器件,以验证HfO间隔层的引入。这些器件分别表现出5.6 μA/μm的电流驱动能力和4.6×10的开/关比。具有无机HfO EGI的VS-TFT通过调制施加的脉冲条件成功表现出基本的突触特性,包括兴奋性/抑制性突触后电流、双脉冲易化和长时程可塑性(LTP)。LTP的持续时间定义为初始值的10%,得到的值为22秒。从50个连续的增强和抑制脉冲中提取线性度,分别得到0.95和1.14的值。此外,在指定漏极电压条件下测得的能耗为1.27 fJ,显示出令人满意的信噪比。这一进展标志着神经形态硬件系统取得了重大进步。