Zhang Ji-Zhe, Xu Xin-Biao, Gong Yanjun, Wang Zhu-Bo, Qi Xiao-Zhuo, Liu Xiao-Jing, Yang Yuan-Hao, Tian Zheng-Hui, Wang Jia-Qi, Zhang Yan-Lei, Li Ming, Guo Yongxian, Yan Yingde, Dong Chun-Hua, Ren Xi-Feng, Zhang Yifan, Zhang Chuang, Guo Guang-Can, Che Yanke, Zou Chang-Ling
Laboratory of Quantum Information, University of Science and Technology of China, Hefei, PR China.
Anhui Province Key Laboratory of Quantum Network, University of Science and Technology of China, Hefei, PR China.
Nat Commun. 2025 Sep 2;16(1):8213. doi: 10.1038/s41467-025-63521-z.
The assembling and reconfiguration of the integrated devices are of great importance to extend the capability of photonic chips based on top-down fabrication approaches. Here, we demonstrate a fully-programmable organic micro-actuator for precise manipulation of on-chip microstructures. Controlled by a low-power laser, the micro-actuator achieves a 30 nm motion step size, and shows the capability to traverse various chip substrates, overcome obstacles, and push microspheres to target locations. The micro-actuator is applied to fine-tune the microcavity and shift the resonance by three linewidths without compromising its quality factor. This optically-driven micro-actuator offers a unique approach for post-fabrication assembly and reconfiguration of photonic circuits, paving the way for adaptive, multifunctional photonic systems.
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