Zhang Ji-Zhe, Xu Xin-Biao, Gong Yanjun, Wang Zhu-Bo, Qi Xiao-Zhuo, Liu Xiao-Jing, Yang Yuan-Hao, Tian Zheng-Hui, Wang Jia-Qi, Zhang Yan-Lei, Li Ming, Guo Yongxian, Yan Yingde, Dong Chun-Hua, Ren Xi-Feng, Zhang Yifan, Zhang Chuang, Guo Guang-Can, Che Yanke, Zou Chang-Ling
Laboratory of Quantum Information, University of Science and Technology of China, Hefei, PR China.
Anhui Province Key Laboratory of Quantum Network, University of Science and Technology of China, Hefei, PR China.
Nat Commun. 2025 Sep 2;16(1):8213. doi: 10.1038/s41467-025-63521-z.
The assembling and reconfiguration of the integrated devices are of great importance to extend the capability of photonic chips based on top-down fabrication approaches. Here, we demonstrate a fully-programmable organic micro-actuator for precise manipulation of on-chip microstructures. Controlled by a low-power laser, the micro-actuator achieves a 30 nm motion step size, and shows the capability to traverse various chip substrates, overcome obstacles, and push microspheres to target locations. The micro-actuator is applied to fine-tune the microcavity and shift the resonance by three linewidths without compromising its quality factor. This optically-driven micro-actuator offers a unique approach for post-fabrication assembly and reconfiguration of photonic circuits, paving the way for adaptive, multifunctional photonic systems.
基于自上而下制造方法，集成器件的组装和重新配置对于扩展光子芯片的功能至关重要。在此，我们展示了一种用于精确操纵片上微结构的全可编程有机微致动器。由低功率激光控制，该微致动器实现了30纳米的运动步长，并展示了穿越各种芯片基板、克服障碍以及将微球推至目标位置的能力。该微致动器被应用于微调微腔并将共振移动三个线宽，同时不降低其品质因数。这种光驱动微致动器为光子电路的制造后组装和重新配置提供了一种独特方法，为自适应、多功能光子系统铺平了道路。
