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影响化学机械抛光性能的纳米磨料关键参数综述

A Comprehensive Review of the Nano-Abrasives Key Parameters Influencing the Performance in Chemical Mechanical Polishing.

作者信息

Bellahsene Houda, Sene Saad, Félix Gautier, Larionova Joulia, Ferrari Marc, Guari Yannick

机构信息

Institut Charles Gerhardt Montpellier (ICGM), Centre National de la Recherche Scientifique (CNRS), École Nationale Supérieure de Chimie de Montpellier (ENSCM), University of Montpellier, 34293 Montpellier, France.

Laboratoire d'Astrophysique de Marseille (LAM), Centre National de la Recherche Scientifique (CNRS), Centre National d'Etudes Spatiales (CNES), Aix Marseille University, 13013 Marseille, France.

出版信息

Nanomaterials (Basel). 2025 Sep 4;15(17):1366. doi: 10.3390/nano15171366.

DOI:10.3390/nano15171366
PMID:40938044
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12430078/
Abstract

Chemical Mechanical Polishing (CMP) is a critical process in many industries where achieving superior surface quality through controlled material removal rates by using nano-abrasives is essential. This review examines key parameters of abrasives at the nanoscale, such as size, shape, aspect ratio, hardness, and surface modifications, through inorganic doping or organic molecule grafting and their influence on CMP performance. By analyzing recent studies, we explore how these parameters affect the tribological and chemical interactions during CMP and link these effects to the fundamental polishing mechanisms. Highlighting emerging trends, this work offers a roadmap for designing next-generation nano-abrasives that boost removal efficiency, enhance surface finish, and ensure process stability. Ultimately, controlling abrasive properties at the nanoscale is vital for advancing CMP technology toward more efficient, consistent, and high-quality results.

摘要

化学机械抛光（CMP）在许多行业中都是一个关键工艺，在这些行业中，通过使用纳米磨料控制材料去除率以实现卓越的表面质量至关重要。本综述研究了纳米级磨料的关键参数，如尺寸、形状、纵横比、硬度以及通过无机掺杂或有机分子接枝进行的表面改性，及其对化学机械抛光性能的影响。通过分析近期研究，我们探讨了这些参数如何影响化学机械抛光过程中的摩擦学和化学相互作用，并将这些影响与基本的抛光机制联系起来。突出新兴趋势，这项工作为设计下一代纳米磨料提供了路线图，这些纳米磨料可提高去除效率、改善表面光洁度并确保工艺稳定性。最终，在纳米尺度上控制磨料性能对于推动化学机械抛光技术朝着更高效、一致和高质量的结果发展至关重要。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/3ec355acbf35/nanomaterials-15-01366-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/c03e6fd26868/nanomaterials-15-01366-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/10efeeb98ea3/nanomaterials-15-01366-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/1ef902380fa7/nanomaterials-15-01366-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/63e3a6280094/nanomaterials-15-01366-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/a95e604a3060/nanomaterials-15-01366-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/6f34c555359a/nanomaterials-15-01366-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/f3c21e6a5f44/nanomaterials-15-01366-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/986cf71a5b64/nanomaterials-15-01366-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/d64119dadb94/nanomaterials-15-01366-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/3ec355acbf35/nanomaterials-15-01366-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/c03e6fd26868/nanomaterials-15-01366-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/10efeeb98ea3/nanomaterials-15-01366-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/1ef902380fa7/nanomaterials-15-01366-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/63e3a6280094/nanomaterials-15-01366-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/a95e604a3060/nanomaterials-15-01366-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/6f34c555359a/nanomaterials-15-01366-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/f3c21e6a5f44/nanomaterials-15-01366-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/986cf71a5b64/nanomaterials-15-01366-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/d64119dadb94/nanomaterials-15-01366-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd87/12430078/3ec355acbf35/nanomaterials-15-01366-g010.jpg

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