Siklós L
Acta Biochim Biophys Acad Sci Hung. 1983;18(3-4):211-22.
A new X-ray microanalyser assembly is described, the main parts of which are a JEOL 100 B transmission electron microscope, a JEOL ASID I scanning attachment, an EDAX 183 B semiconductor detector and a KFKI ICA 70 4k multichannel analyser. By using this equipment, qualitative analysis, equivalent to the original EDAX version, can be performed. Furthermore it is possible to visualize simultaneously the spatial distribution of two or more elements in the sample. The mass of the excited volume of the sample can be determined, independently of the X-ray measurements, by using the electron detector of the scanning attachment. The reproducibility of such measurements is demonstrated and a calibration curve is given. By recording the excited mass of the sample during the X-ray analysis, the damage caused by the exciting electron beam was also examined.
本文描述了一种新型的X射线微分析仪组件，其主要部件包括一台JEOL 100 B透射电子显微镜、一台JEOL ASID I扫描附件、一个EDAX 183 B半导体探测器和一台KFKI ICA 70 4k多通道分析仪。使用该设备可以进行与原始EDAX版本相当的定性分析。此外，还能够同时可视化样品中两种或更多种元素的空间分布。通过使用扫描附件的电子探测器，可以独立于X射线测量来确定样品激发体积的质量。展示了此类测量的可重复性并给出了校准曲线。通过在X射线分析过程中记录样品的激发质量，还对激发电子束造成的损伤进行了研究。
