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电场作用下双嵌段共聚物薄膜微区取向的局部控制

Local Control of Microdomain Orientation in Diblock Copolymer Thin Films with Electric Fields.

作者信息

Morkved TL, Lu M, Urbas AM, Ehrichs EE, Jaeger HM, Mansky P, Russell TP

机构信息

T. L. Morkved, M. Lu, A. M. Urbas, E. E. Ehrichs, H. M. Jaeger, James Franck Institute and Department of Physics, University of Chicago, Chicago, IL 60637, USA. P. Mansky and T. P. Russell, IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120, USA.

出版信息

Science. 1996 Aug 16;273(5277):931-3. doi: 10.1126/science.273.5277.931.

Abstract

Local control of the domain orientation in diblock copolymer thin films can be obtained by the application of electric fields on micrometer-length scales. Thin films of an asymmetric polystyrene-polymethylmethacrylate diblock copolymer, with cylindrical polymethylmethacrylate microdomains, were spin-coated onto substrates previously patterned with planar electrodes. The substrates, 100-nanometer-thick silicon nitride membranes, allow direct observation of the electrodes and the copolymer domain structure by transmission electron microscopy. The cylinders aligned parallel to the electric field lines for fields exceeding 30 kilovolts per centimeter, after annealing at 250°C in an inert atmosphere for 24 hours. This technique could find application in nanostructure fabrication.

摘要

通过在微米尺度上施加电场,可以实现对双嵌段共聚物薄膜中畴取向的局部控制。将具有圆柱形聚甲基丙烯酸甲酯微畴的不对称聚苯乙烯-聚甲基丙烯酸甲酯双嵌段共聚物薄膜旋涂到预先用平面电极图案化的基板上。这些基板是100纳米厚的氮化硅膜,可通过透射电子显微镜直接观察电极和共聚物畴结构。在惰性气氛中于250℃退火24小时后,对于超过30千伏/厘米的电场,圆柱体与电场线平行排列。该技术可应用于纳米结构制造。

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