Joy D C, Joy C S, Bunn R D
Oak Ridge National Laboratory, Tennessee, USA.
Scanning. 1996 Nov;18(8):533-8. doi: 10.1002/sca.4950180802.
A simple digital method of measuring the performance of detectors in the scanning electron microscope (SEM) is described. The value derived is absolute and can therefore be used to compare both different detectors on the same instrument as well as different detectors on different instruments. The technique can be applied to secondary electron, backscattered electron, and energy-dispersive x-ray detectors. Examples are given of measurements made on a variety of commercial detectors installed on a number of current SEMs.
本文描述了一种用于测量扫描电子显微镜（SEM）中探测器性能的简单数字方法。所得到的值是绝对的，因此可用于比较同一仪器上的不同探测器以及不同仪器上的不同探测器。该技术可应用于二次电子、背散射电子和能量色散X射线探测器。文中给出了在当前一些扫描电子显微镜上安装的各种商用探测器的测量示例。
