Folch A, Ayon A, Hurtado O, Schmidt M A, Toner M
Center for Engineering in Medicine, Massachusetts General Hospital, Harvard Medical School, Shriners Burns Hospital, Boston 02139, USA.
J Biomech Eng. 1999 Feb;121(1):28-34. doi: 10.1115/1.2798038.
Here we demonstrate the microfabrication of deep (> 25 microns) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator (SOI) wafers and photolithographic patterning of a spin-coated photoplastic layer. Although the SOI wafers can be patterned at higher resolution, we found that the inexpensive photoplastic yields similar replication fidelity. The latter is mostly limited by the mechanical stability of the replicated PDMS structures. As an example, we demonstrate the selective delivery of different cell suspensions to specific locations of a tissue culture substrate resulting in micropatterns of attached cells.
在此，我们展示了通过从微加工的硅衬底复制模塑聚二甲基硅氧烷（PDMS）来制造深度大于25微米的聚合物微结构。讨论了PDMS结构在微流体和生物应用中的用途。我们研究了两种用于微加工硅模具的方法的可行性：绝缘体上硅（SOI）晶圆的深等离子体蚀刻和旋涂光塑性层的光刻图案化。尽管SOI晶圆可以以更高的分辨率进行图案化，但我们发现便宜的光塑性材料能产生相似的复制保真度。后者主要受复制的PDMS结构的机械稳定性限制。作为一个例子，我们展示了将不同的细胞悬液选择性地输送到组织培养底物的特定位置，从而形成附着细胞的微图案。
