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多壁碳纳米纤维的等离子体增强化学气相沉积

Plasma-enhanced chemical vapor deposition of multiwalled carbon nanofibers.

作者信息

Matthews Kristopher, Cruden Brett A, Chen Bin, Meyyappan M, Delzeit Lance

机构信息

NASA Ames Research Center, Moffett Field, California, USA.

出版信息

J Nanosci Nanotechnol. 2002 Oct;2(5):475-80. doi: 10.1166/153348802760394025.

Abstract

Plasma-enhanced chemical vapor deposition is used to grow vertically aligned multiwalled carbon nanofibers (MWNFs). The graphite basal planes in these nanofibers are not parallel as in nanotubes; instead they exhibit a small angle resembling a stacked cone arrangement. A parametric study with varying process parameters such as growth temperature, feedstock composition, and substrate power has been conducted, and these parameters are found to influence the growth rate, diameter, and morphology. The well-aligned MWNFs are suitable for fabricating electrode systems in sensor and device development.

摘要

等离子体增强化学气相沉积法用于生长垂直排列的多壁碳纳米纤维(MWNFs)。这些纳米纤维中的石墨基面不像纳米管那样平行;相反,它们呈现出一个小角度,类似于堆叠的圆锥排列。已经进行了一项关于生长温度、原料组成和衬底功率等不同工艺参数的参数研究,发现这些参数会影响生长速率、直径和形态。排列良好的MWNFs适用于传感器和器件开发中的电极系统制造。

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