Halik Marcus, Klauk Hagen, Zschieschang Ute, Schmid Günter, Dehm Christine, Schütz Markus, Maisch Steffen, Effenberger Franz, Brunnbauer Markus, Stellacci Francesco
Infineon Technologies AG, New Memory Platforms, Materials and Technology, Paul-Gossen-Strasse 100, 91052 Erlangen, Germany.
Nature. 2004 Oct 21;431(7011):963-6. doi: 10.1038/nature02987.
Organic thin film transistors (TFTs) are of interest for a variety of large-area electronic applications, such as displays, sensors and electronic barcodes. One of the key problems with existing organic TFTs is their large operating voltage, which often exceeds 20 V. This is due to poor capacitive coupling through relatively thick gate dielectric layers: these dielectrics are usually either inorganic oxides or nitrides, or insulating polymers, and are often thicker than 100 nm to minimize gate leakage currents. Here we demonstrate a manufacturing process for TFTs with a 2.5-nm-thick molecular self-assembled monolayer (SAM) gate dielectric and a high-mobility organic semiconductor (pentacene). These TFTs operate with supply voltages of less than 2 V, yet have gate currents that are lower than those of advanced silicon field-effect transistors with SiO2 dielectrics. These results should therefore increase the prospects of using organic TFTs in low-power applications (such as portable devices). Moreover, molecular SAMs may even be of interest for advanced silicon transistors where the continued reduction in dielectric thickness leads to ever greater gate leakage and power dissipation.
有机薄膜晶体管(TFT)在各种大面积电子应用中备受关注,如显示器、传感器和电子条形码。现有有机TFT的关键问题之一是其工作电压高,通常超过20V。这是由于通过相对较厚的栅极介电层的电容耦合较差:这些电介质通常是无机氧化物或氮化物,或者是绝缘聚合物,并且通常厚度超过100nm以最小化栅极泄漏电流。在此,我们展示了一种用于制造具有2.5nm厚分子自组装单层(SAM)栅极电介质和高迁移率有机半导体(并五苯)的TFT的制造工艺。这些TFT在低于2V的电源电压下工作,但栅极电流低于具有SiO2电介质的先进硅场效应晶体管的栅极电流。因此,这些结果应会增加在低功耗应用(如便携式设备)中使用有机TFT的前景。此外,对于先进的硅晶体管,分子SAM甚至可能受到关注,因为介电层厚度的持续减小会导致越来越大的栅极泄漏和功耗。