Kim Seongjae, Yoo Hocheon
Department of Electronic Engineering, Gachon University, Seongnam 13120, Korea.
Micromachines (Basel). 2021 May 17;12(5):565. doi: 10.3390/mi12050565.
Self-assembled monolayers (SAMs), molecular structures consisting of assemblies formed in an ordered monolayer domain, are revisited to introduce their various functions in electronic devices. SAMs have been used as ultrathin gate dielectric layers in low-voltage transistors owing to their molecularly thin nature. In addition to the contribution of SAMs as gate dielectric layers, SAMs contribute to the transistor as a semiconducting active layer. Beyond the transistor components, SAMs have recently been applied in other electronic applications, including as remote doping materials and molecular linkers to anchor target biomarkers. This review comprehensively covers SAM-based electronic devices, focusing on the various applications that utilize the physical and chemical properties of SAMs.
自组装单分子层（SAMs）是由在有序单分子层区域形成的组装体组成的分子结构，本文对其在电子器件中的各种功能进行了重新探讨。由于其分子层面的超薄特性，SAMs已被用作低压晶体管中的超薄栅极介电层。除了作为栅极介电层的作用外，SAMs还作为半导体活性层对晶体管做出贡献。除了晶体管组件，SAMs最近还被应用于其他电子应用中，包括作为远程掺杂材料和锚定目标生物标志物的分子连接体。本综述全面涵盖了基于SAMs的电子器件，重点关注利用SAMs物理和化学性质的各种应用。
