LaFratta Christopher N, Li Linjie, Fourkas John T
Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, USA.
Proc Natl Acad Sci U S A. 2006 Jun 6;103(23):8589-94. doi: 10.1073/pnas.0603247103. Epub 2006 May 23.
There is growing interest in lithographic technologies for creating 3D microstructures. Such techniques are generally serial in nature, prohibiting the mass production of devices. Soft-lithographic techniques show great promise for simple and rapid replication of arrays of microstructures but have heretofore not been capable of direct replication of structures with closed loops. We demonstrate that 3D microstructures created with multiphoton absorption polymerization can be replicated by using microtransfer molding to afford complex daughter structures containing closed loops. This method relieves many of the topological constraints of soft lithography, paving the way for the large-scale replication of true 3D microstructures.
人们对用于创建三维微结构的光刻技术的兴趣与日俱增。此类技术本质上通常是串行的，不利于器件的大规模生产。软光刻技术在简单快速复制微结构阵列方面显示出巨大潜力，但迄今为止还无法直接复制具有闭环的结构。我们证明，通过多光子吸收聚合创建的三维微结构可以使用微转移模塑进行复制，以得到包含闭环的复杂子结构。该方法缓解了软光刻的许多拓扑限制，为真正三维微结构的大规模复制铺平了道路。
