Smith David J
Department of Physics, Arizona State University, Tempe, Arizona 85287-1504, USA.
Microsc Microanal. 2008 Feb;14(1):2-15. doi: 10.1017/S1431927608080124. Epub 2008 Jan 3.
The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-Angstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.
球差的成功校正对于整个电子显微镜领域而言是一项令人兴奋且具有革命性的进展。图像的可解释性能够扩展至亚埃级别，从而为材料表征创造诸多新机遇。透镜像差的校正涉及在固定束或扫描透射电子显微镜中直接（在线）连接硬件，或者使用离轴电子全息术或焦系列重建进行间接（离线）软件处理。本综述追溯了实现像差校正过程中的一些重要步骤，包括早期硬件校正器的尝试、在线显微镜控制的发展以及像差精确测量的方法。本文还综述了使用这些不同方法的像差校正电子显微镜的最新进展和一些初步应用。最后，简要讨论了未来前景和问题。
