Friis P, Hoppe K, Leistiko O, Mogensen K B, Hübner J, Kutter J P
Appl Opt. 2001 Dec 1;40(34):6246-51. doi: 10.1364/ao.40.006246.
Sealing of the flow channel is an important aspect during integration of microfluidic channels and optical waveguides. The uneven topography of many waveguide-fabrication techniques will lead to leakage of the fluid channels. Planarization methods such as chemical mechanical polishing or the etch-back technique are possible, but troublesome. We present a simple but efficient alternative: By means of changing the waveguide layout, bonding pads are formed along the microfluidic channels. With the same height as the waveguide, they effectively prevent leakage and hermetically seal the channels during bonding. Negligible influence on light propagation is found when 10-mum-wide bonding pads are used. Fabricated microsystems with application in absorbance measurements and flow cytometry are presented.
在微流控通道与光波导集成过程中，流道密封是一个重要方面。许多波导制造技术的表面形貌不均匀会导致流体通道泄漏。诸如化学机械抛光或回蚀技术等平面化方法是可行的，但很麻烦。我们提出一种简单而有效的替代方法：通过改变波导布局，沿微流控通道形成键合焊盘。它们与波导高度相同，在键合过程中能有效防止泄漏并实现通道的气密密封。当使用10微米宽的键合焊盘时，对光传播的影响可忽略不计。本文展示了在吸光度测量和流式细胞术中应用的微系统。
